AFM observation of OMVPE grown ErP on InP (0 0 1), (1 1 1)A and (1 1 1)B substrates

Materials Science in Semiconductor Processing

Volumn 6, Issue 5-6, 2003, Pages 461-464

  Kuno, T ^a   Akane, T ^b   Jinno, S ^a   Hirata, T ^a   Yang, Y ^a   Isogai, Y ^a   Watanabe, N ^a   Fujiwara, Y ^a,b   Nakamura, A ^a,b   Takeda, Y ^a,b  

^a NAGOYA UNIVERSITY   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

ErP; InP(0 0 1); InP(1 1 1)A; InP(1 1 1)B; OMVPE

Indexed keywords

ANNEALING; ATOMIC FORCE MICROSCOPY; FLUORESCENCE; INDIUM COMPOUNDS; METALLORGANIC VAPOR PHASE EPITAXY; MORPHOLOGY; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SCANNING TUNNELING MICROSCOPY; X RAY ANALYSIS;

INP(001); INP(111)B;

ERBIUM COMPOUNDS;

EID: 12144291564     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mssp.2003.07.031     Document Type: Conference Paper

References (13)

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