Layer structure analysis of Er δ-doped InP by x-ray crystal truncation rod scattering

Journal of Applied Physics

Volumn 82, Issue 2, 1997, Pages 635-638

  Takeda, Yoshikazu ^a   Fujita, Keiji ^a   Matsubara, Naoteru ^a   Yamada, Naoki ^a   Ichiki, Satofumi ^a   Tabuchi, Masao ^a   Fujiwara, Yasufumi ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; CRYSTAL STRUCTURE; ELECTROMAGNETIC WAVE SCATTERING; ERBIUM; HETEROJUNCTIONS; METALLORGANIC VAPOR PHASE EPITAXY; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR DOPING; SYNCHROTRON RADIATION; X RAY ANALYSIS;

LAYER STRUCTURE ANALYSIS; ROCKSALT STRUCTURE; X RAY CRYSTAL TRUNCATION ROD SCATTERING; X RAY INTERFERENCE;

SEMICONDUCTING INDIUM PHOSPHIDE;

EID: 0031186209     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.365591     Document Type: Article

References (13)

1. N. Tabatabaie, T. Sands, J. P. Harbison, H. L. Gilchrist, and V. G. Keramidas, Appl. Phys. Lett. 53, 2528 (1988).
2. Y. Fujiwara, N. Matsubara, J. Yuhara, M. Tabuchi, K. Fujita, N. Yamada, Y. Nonogaki, Y. Takeda, and K. Morita, Inst. Phys. Conf. Ser. 145, 149 (1996).
3. I. K. Robinson, Phys. Rev. B 33, 3830 (1986).
4. J. Harada, Acta Crystallogr. Sec. A 48, 764 (1992).
5. Y. Takeda, Y. Sakuraba, K. Fujibayashi, M. Tabuchi, T. Kumamoto, I. Takahashi, J. Harada, and H. Kamei, Appl. Phys. Lett. 66, 332 (1995).
6. M. Tabuchi, K. Fujibayashi, N. Yamada, Y. Takeda, and H. Kamei, J. Electron. Mater. 25, 671 (1996).
7. M. Tabuchi, Y. Takeda, Y. Sakuraba, T. Kumamoto, K. Fujibayashi, I. Takahashi, J. Harada, and H. Kamei, J. Cryst. Growth 146, 148 (1995).
8. M. Tabuchi, K. Hagiwara, A. Kobashi, N. Yamada, K. Fujibayashi, and Y. Takeda, Inst. Phys. Conf. Ser. 145, 227 (1995).
9. Y. Fujiwara, Y. Ito, Y. Nonogaki, N. Matsubara, K. Fujita, and Y. Takeda, Defects in Semiconductors, Materials Science Forum (Trans. Tech., Zurich, 1995), Vol. 196-201, p. 621.
10. Y. Fujiwara, S. Furuta, K. Makita, Y. Ito, Y. Nonogaki, and Y. Takeda, J. Cryst. Growth 146, 544 (1995).
11. N. Jourdan, H. Yamaguchi, and Y. Horikoshi, Jpn. J. Appl. Phys. 1 32, L1784 (1993).
12. J. D. Ralston, J. Wagner, F. Fuchs, P. Hiesinger, and J. Schamalzlin, J. Cryst. Growth 111, 989 (1991).
13. K.-H. Hellwedge and A. M. Hellwedge, Landolt-Bornstein (Springer, Berlin, 1979), Group III, Vol. 7, Part C, p. 16.