Forging solid-state microactuators through the merging of smart material and microelectromechanical systems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3046, Issue , 1997, Pages 137-147

  Pokines, Brett ^a   Garcia, Ephrahim ^a  

^a VANDERBILT UNIVERSITY   (United States)

Author keywords

Liga; Microactuation; Microelectromechanical systems; Smart materials; Strain amplifier; Vibration control

Indexed keywords

ELECTROMECHANICAL DEVICES; FLEXIBLE STRUCTURES; INTELLIGENT MATERIALS; MERGING; MICROACTUATORS; VIBRATION CONTROL;

ELECTROPLATED NICKEL; ENVIRONMENTAL DISTURBANCES; LIGA; MECHANICAL ELEMENTS; MICROACTUATION; MULTIPLE COMPONENTS; OPTICAL COMPONENTS; STRAIN AMPLIFICATION;

MEMS;

EID: 11744266756     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.276601     Document Type: Conference Paper

References (25)

1. Bergstrom, P., Ji, J., Liu, Y., Kaviany, M., Wise, K., "Thermally Driven Phase-Change Microactuation, " Journal of Microelectromachanical Systems, Vol. 4, No. 1, March, 1995, pp. 10-17.
2. Wagner, B., Kreutzer Benecke, W., "Permanent Magnet Micromotors on Silicon Substrates, " Journal of Microelectromachanical Systems, Vol. 2, No. 1, March 1992, pp. 23-29.
3. Rambin, C., Warrinton, R., "Microassembly with a Focused Laser Beam, " IEEE Proceedings Micro Electro Mechanical Systems, Oiso, Japan, Jan 1994, pp. 285-290.
4. Neagu, C., Gardeniers, J., Elwenspoek, M., Kelly, J., "An Electrochemical Microactuator: Principles and First Results, " Journal of Microelectromachanical Systems, Vol. 5, No. 1 March 1996, pp. 1-9.
5. Wadsworth, D., Muntz, P., "A Computational study of Radiometric Phenomena for Powering Microactuators with Displacements and Large Forces, " Journal ofMicroelectromachanical Systems, . Vol. 5., No. 1, March, 1996, pp. 59-65.
6. Dario, P., Valleggi, R., Carrozza, M., Montesi, M., Cocco, M., "Microactuators for Microrobots: A Critical Survey, " J. Micromech. Microeng. 2 (1992), pp. 141-157.
7. Judy, J., Muller, R., "Magnetic Microactuator of Polysilicon Flexure Structures, " Journal ofMicroelectromachanical Systems, Vol. 4, No. 4, Dec. 95, pp. 162-169.
8. Ahn, C., Allen, M., "A Fully Integrated Surface Micromachined Magnetic Microactuator With A Multilevel, Meander Core, " Journal ofMicroelectromachanical Systems, Vol. 2, No. 1, March, 1993, pp. 15-22.
9. Minami, K., Kawamura, S., Esashi, M., "Fabrication ofDistributed electrostatic Micro Actuator (DEMA), " Journal of Microelectromachanical Systems, Vol. 2, No. 3, Sept. 93, pp. 121-127.
10. Ataka, M., Omodaka, A., Takeshima, N., Fujita, H., "Fabrication and Operation of Polymide Bimorph Actuators for a Ciliary Motion System, " Journal ofMicroelectromachanical Systems, Vol. 2, No. 4, Dec. 1993, pp. 146-150.
11. Murult, P., Kohli, M., Maeder, J., Kholkin, A., Brooks, K., Selter, N., Zuther, R., "Fabrication and Characterization of PZT Thin Film Vibrator for Micromotors, " Sensor and Actuators A, Vol. 48, No 2, March 1995 pp. 157-165.
12. Quandt, E., Seeman, K., "Fabrication and Simulation ofMagnetostrictive Thin Film Actuator, " Sensors and Actuators A, Vol. 50, No. 1-2, August 1995, pp. 105-110.
13. Chu, W., Mehregany, M., Mullen, R., "Analysis of Tip Deflection and Force of a Bimetallic Cantilever Microactuator, " Journal ofMicroelectromachanical Systems, Vol. 3, No. 1, March, 1993, pp. 4-7.
14. Mohr, Bleg, Walirabe, "Microactuators Fabricated by the LIGA Process, " Journal ofMicroelectromachanical Systems, Vol. 2, No. 4., Dec 1992.
15. Legtenberg, R., Groeneveld, A., Elwenspoek, M., "Comb-drive actuators for Large Displacements, " J. Micromech. Microeng. Vol. 6, No. 3, Sept 1996, pp. 326-329.
16. Krulevitch, "Thin film Shape memory Alloy Microactuaors, " Journal ofMicroelectromachanical Systems, Vol. 5. No. 4, Dec. 1996.
17. Johnson, D., "Vacuum-deposited TiNi Shape Memory Film: Characterization and applications in Microdevices, " J. Micromech. Microeng. 1 (1991), pp. 34-41.
18. Lunner, T, Department of Technical Audiology, Linkoping University, Sweden, "AComputer in the Ear, " presented at Vanderbilt University, Department ofMechanical Engineering, Nashville, 1996.
19. Crawley, E., de Luis, "Experimental Verification ofDistributed Piezoelectric Actuators for Use in Precision Space Structures, " AIAApaper number 86-0878, 1986, pp. 116-124.
20. Williams, C., Yates, R., "Analysis of a Micro-Electric Generator for Microsystems, " Sensor and Actuators, A 52 (1996) pp. 8-11.
21. Cunningham, M., Jenkins, D., Clegg, M., Bakush, M., "Active Vibration and Actuation of a Small Cantilever for Applications in Scanning Probe Instruments, " Sensor and Actuators A 50 (1995) pp. 147-150.
22. Goldfarb, M., Celanovic, N., "Minimum Surface-Effect Microgripper Design for Force-Reflective Telemanipulation of Microscopic Environment, " Proceedings of the ASME International Mechanical Engineering Conference and Exposition, November, 1996.
23. Newton. D., Garcia, E., "Bidirectional Operating Actuator (BOA), ' NASA Technical Brief, 1997, to appear. 146.
24. Huang, X., Saif, M., MacDonald, N., "A Micromotion Amplifier, " Proceeding 9th International Workshop on Micro Electro Mechanical Systems, San Diego, Feb. 1996, pp. 424-428.
25. Banford, Glasier, Moore, "Induced-Strain Actuator with Mechanical Amplification, " NASA Tech Briefs. Jan. 1997, p. 60.