Fabrication of Distributed Electrostatic Micro Actuator (DEMA)>/ti>

Journal of Microelectromechanical Systems

Volumn 2, Issue 3, 1993, Pages 121-127

  Minami, K ^a   Kawamura, S ^a   Esashi, M ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEFORMATION; ELECTRODES; ELECTROSTATIC DEVICES; ELECTROSTATICS; FINITE ELEMENT METHOD; MECHANICAL VARIABLES CONTROL; MICROELECTROMECHANICAL DEVICES; PHOTOLITHOGRAPHY; PLASTIC FILMS; POLYIMIDES;

DISTRIBUTED ELECTROSTATIC MICRO ACTUATOR (DEMA); ELECTROSTATIC FORCE;

ACTUATORS;

EID: 0027668109     PISSN: 10577157     EISSN: 19410158     Source Type: Journal    
DOI: 10.1109/84.260256     Document Type: Article

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