Structure and properties of ta-C films deposited by filtered cathodic vacuum arc technology as a function of substrate bias

Cailiao Yanjiu Xuebao/Chinese Journal of Materials Research

Volumn 18, Issue 1, 2004, Pages 76-81

  Zhu, Jiaqi ^a   Meng, Songhe ^a   Han, Jiecai ^a   Tan, Manlin ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Filtered cathodic vacuum arc (FCVA); Inorganic non metallic materials; Mechanical properties; Raman spectra; Substrate bias; Tetrahedral amorphous carbon (ta C)

Indexed keywords

AMORPHOUS FILMS; ATOMIC FORCE MICROSCOPY; MECHANICAL PROPERTIES; MICROSTRUCTURE; MORPHOLOGY; RAMAN SPECTROSCOPY; SUBSTRATES;

FILTERED CATHODIC VACUUM ARC; NANO INDENTOR; SUBSTRATE BIAS; TETRAHEDRAL AMORPHOUS CARBON;

DIAMOND LIKE CARBON FILMS;

EID: 2942553047     PISSN: 10053093     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (23)

1. J.Robertson, Materials Science and Engineering R, 37, 131(2002)
2. Q.Wei, J.Narayan, International Materials Reviews, 45, 133(2000)
3. CHEN Zhiying, Ph.D. thesis, Shanghai Institute of Metallurgy, Chinese Academy of Science, 1997
4. R.Lossy, D.L.Pappas, R.A.Roy, J.J.Cuomo, V.M.Sura, Appl. Phys. Lett., 61, 171(1992)
5. Aixiang Wei, Dihu Chen, Shaoqi Peng, Ning Ke, S.P.Wong, Diamond Relat. Mater., 6, 983(1997)
6. Shi Xu, B.K. Tay, H.S. Tan, Li Zhong, Y.Q.Tu, S.R.P.Silva, W.I.Milne, J. Appl. Phys., 79, 7234(1996)
7. P.J. Fallon, V.S.Veerasamy, C.A.Davis, J.Robertson, G.A.J.Amaratunga, W.I.Milne, J.Koskinen, Phys. Rev. B, 48, 4777(1993)
8. Y.Lifshitz, Diamond Relat. Mater., 5, 388(1996)
9. F.Davanloo, T.J.Lee, D.R.Jander, H.Park, J.H.You, C.B.Collins, J. Appl. Phys., 71, 1446(1992)
10. B.Schultrich, H.J.Scheibe, D.Drescher, H.Ziegele, Surf. Coat. Technol., 98, 1097(1998)
11. HAN Jiecai, ZHU Jiaqi, Meng Songhe, Journal of Functional Materials and Devices, 9(2), 118(2003)
12. A.C.Ferrari, Diamond Relat. Mater., 11, 1053(2002)
13. LIANG Feng, YAN Xuejian, Acta Physica Sinica, 48, 1095(1999)
14. M.A.Tamor, W.C.Vassell, J. Appl. Phys., 76, 3823(1994)
15. J.Schwan, S.Vlrich, V.Batori, H.Ehrhardt, S.R.P.Silva, J. Appl. Phys., 80, 440(1996)
16. S.Prawer, K.W.Nugent, Y.Lifishitz, G.D.Lempert, G.Grossman, J.Kulik, I.Avigal, R.Kalish, Diamond Relat. Mater., 5, 433(1996)
17. B.K.Tay, X.Shi, H.S.Tan, H.S.Yang, Z.Sun, Surf. Coat. Technol., 105, 155(1998)
18. ZHU Jijun, LU Zuhong, ZHONG Xin, Journal of Applied Sciences, 18, 47(2000)
19. K.W.R.Gilkes, S.Prawer, K.W.Nugent, J. Robertson, H.S.Sands, Y.Lifshitz, X.Shi, J. Appl. Phys., 87, 7283(2000)
20. Y.Lishitz, G.D.Lempert, E.Grossman, I.Avigal, C.Uzen-Saguy, R.Kalish, J.Kulik, D.Marton, J.W.Rabalais, Diamond Relat. Mater., 4, 318(1995)
21. M.Chhowalla, Y.Yin, G.A.J.Amaratunga, D.R.McKenzie, Th. Frauenheim, Appl. Phys. Lett., 69, 2344(1996)
22. A.C.Ferrari, S.E.Rodil, J.Robertson, W.I.Milne, Diamond Relat. Mater., 11, 994(2002)
23. D.R.McKenzie, D.Muller, B.A.Pailthorpe, Phys. Rev. Lett., 67, 773(1991)