X-ray reflectivity study of tetrahedral amorphous carbon films

International Journal of Modern Physics B

Volumn 14, Issue 2-3, 2000, Pages 181-187

  Tay, B K ^a   Shi, X ^a   Lau, S P ^a   Zhang, Q ^a   Chua, H C ^a   Shi, J R ^a   Lim, E C ^a   Lee, H Y ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; NITROGEN; SILICON;

CONFERENCE PAPER; DENSITY; DIFFUSION; ELECTRIC POTENTIAL; ENERGY TRANSFER; FILM; SIMULATION; STRUCTURE ANALYSIS; TECHNIQUE; THICKNESS; VACUUM; X RAY ANALYSIS;

EID: 0034731756     PISSN: 02179792     EISSN: None     Source Type: Journal    
DOI: 10.1142/s0217979200000170     Document Type: Conference Paper

References (20)