Plasma etching to enhance visibility of nano particles in nanocomposites

Computers, Materials and Continua

Volumn 1, Issue 4, 2004, Pages 309-318

  Shivakumar, Kunigal N ^a   Lingaiah, Shivalingappa ^b   Sadler, Robert ^b   Sharpe, Matthew ^b  

^a North Carolina Agricultural and Technical State University   (United States)

^b NORTH CAROLINA A AND T STATE UNIVERSITY   (United States)

Author keywords

Nanoclay; Nanovermiculite; Plasma etching; SEM

Indexed keywords

ETCHING MEDIA; NANOCLAY; NANOVERMICULITE; POLYMER MATERIALS;

MATRIX ALGEBRA; NANOSTRUCTURED MATERIALS; NOZZLES; POLYMERS; SCANNING ELECTRON MICROSCOPY; THERMAL EFFECTS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

PLASMA ETCHING;

EID: 11144302112     PISSN: 15462218     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (24)

1. Abe, A.; Sonbe, Y.; Enomoto, T. (1973): Jpn. J.Appl. Phys., Vol 12, pp. 154.
2. Bersin, R. L. (1978): Kodak Microelectronics Seminar Proc., San Diego, California, October 1-3.
3. Christopher, D.; Himmel; May, G. S. (1993): Advantages of Plasma Etch Modeling Using Neural Networks Over Statiscal Techniques, IEEE Transactions on Semiconductor Manufacturing, Vol. 6, pp. 103-111.
4. Gilman, J. W.; Morgan, A. B. (2003): Characterization of Polymer-layered silicon (clay) nanocomposite by transmission electron microscope and x-ray diffraction: A comparative study, J. Appl. Polym. Sci., Vol. 87, pp.1329-1338.
5. Glinka, C. J. (2002): Summer School Notes on Neutron Scattering and Reflectometry from Submicron Structures, NIST, Center for Neutron Research, June 3-7, 2002.
6. Hanarp; Per.; Sutherland, Gold, D. S.; Julie; Kasemo; Bengt (2003): Control of nanoparticle film structure for colloidal lithography, Colloids and Surfaces A: Physicochemical and Engineering Aspects, Vol. 214, n 1-3, pp. 23-36.
7. He, J. A.; Valluzzi, R.; Yang, K.; Dolukhanyan, T.; Sung, C.; Kumar, J.; Tripathy, S. K.; Samuelson, L.; Balogh, L.; Tomalia, D. A. (1999): Electrostatic Multilayer Deposition of a Gold-Dendrimer Nanocomposite, Chem. Mater, Vol. 11, pp. 3268-3274.
8. Herman, V.; Boenig, (1988): Fundamentals of Plasma Chemistry and Technology, Technomic Publishing Co., Lancaster, Pennsylvania, pp. 165-194.
9. Ho, D. L.; Briber, R. M.; Glinka, C. (2001): Characterization of organically Modified clay using scattering and Microscopy techniques, J. Chem. Mater, Vol. 13, pp. 1923-1931.
10. Inving, S. M. (1968): Kodak Photoresist Seminar, Vol. 2, pp.26.
11. 4/Ar Plasma, Journal of the Korean Physical Society, Vol. 41, pp. 439-444.
12. Kim, M. C.; Yang, S. H.; Boo, J. H.; Han, J. G. (2003): Surface treatment of metals using an atmospheric pressure plasma jet and their surface characteristics, Surface and coatings Technology, Vol. 174-175, pp. 839-844.
13. Koo, J. H.; Stretz, H.; Bray, A.; Wootan, W.; Mulich, S.; Powell, B.; Weispfenning, J.; Grupa, T. (2003): Nanostructured materials for Rocket Propulsion System, 44th AIAA/ASME/ASCE/AHS Structures, Structural Dynamics, and Materials Conference, Norfolk, VA, April 7-10, pp.1-11.
14. Lan, T.; Pinnavaia, T. J. (1994): Clay-Reinforced Epoxy Nanocomposites, Chem. Mater, Vol. 6, pp. 2216-2219.
15. Li, G. Z.; Wang, L.; Toghiani, H.; Daulton, T. L.; Koyama, K.; Pittman, C. U. Jr. (2001): Viscoelastic and Mechanical properties of Epoxy/ Multifunctional Polyhedral Oligomeric Silsesquioxane Nanocomposites and Epoxy/Ladder like Polyphenylsilsesquioxane Blends, Macromolecules, Vol. 34, pp. 8686-8693.
16. Manias, E. (2001): Concurrent Enhancement of Various Material Properties in Polymer/Clay Nano composites in Advance Composites, Technomic Publishing Co., VA, editors: Hyer M.W, Loss A.C.
17. Marnor, M.; Auret, F. D.; Goodman, S. A.; Malherbe, J. B. (1999): Argon plasma sputter etching induced defect levels in strained, epitaxial p-type Si-Ge alloys, Thin Solid Films, Vol. 343-344, No. 4, pp. 416-419.
18. Mitra, Y.; Hossein, T.; Kingery, W. L.; Pittman, C. U. Jr. (2004): Preparation Characterization and properties of Exfoliated/Delaminated Organically Modified Clay/Dicyclopentadiene Resin Nanocomposites, Macromolecules, Vol. 37, pp. 2511-2518.
19. Morgan, A. B.; Gilman, J. W.; Jackson, C. L. (2002): Proceedings of the American Chemical Society: Polymeric Materials Science & Engineering, Vol. 82, San Francisco, CA, March 2000; American Chemical Society: Washington, DC, 2000, pp.270-271.
20. Patton, R. D.; Pittman, C. U. Jr.; Wang, L.; Hill, J. R. (1999): Vapor Grown Carbon Fiber Composites with Epoxy and Poly (phenylene sulfide) Matrices, Composites, Part A, Vol. 30, pp. 1081-1091.
21. Percy, M. J.; Barthet, C.; Lobb, J. C.; Khan, M. A.; Lascelles, S. F.; Vamvakaki, M.; Armes, S. (2000): Synthesis and Characterization of Vinyl Polymer-Silica Colloidal Nanocomposite, Langmuir, Vol. 16, pp. 6913-6920.
22. Pyun, J.; Matyjaszewski, K.; Kowalewski, T.; Savin, D.; Patternson, G.; Kickelbick, G.; Huesing, N. (2001): Synthesis of Well-Defined Block Copolymers Tehered to Polysilsesquioxane Nanoparticle and their Nanoscale Morphology on Surfaces, J. Am. Chem. Soc., Vol. 123, pp. 9445-9446.
23. Tamaki, R.; Choi, J.; Laine, R. M. (2003): Polyimide Nanocomposite from Octe Silsequioxane, Chem. Mater, Vol. 15, pp.739-797.
24. Yoshihara, M.; Oie, H.; Okada, A.; Matsui, H.; Ohshiro, S. (2002): Synthesis of Yttrium-Organic Hybrid Networks, Macromolecules, Vol. 35, pp. 2435-2436.