A generalized algebraic equation for the pull-in condition in micromachined electrostatic micromirrors : Modeling and characterization

21st IEEE Convention of the Electrical and Electronic Engineers in Israel, Proceedings

Volumn , Issue , 2000, Pages 425-428

  Bochobza Degani, O ^a   Seter, D J ^a   Socher, E ^a   Nemirovsky, Y ^a  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ALGEBRA; DEGREES OF FREEDOM (MECHANICS); ELECTROSTATICS;

ALGEBRAIC EQUATIONS; ANALYTICAL APPROACH; CASE-STUDIES; DEGREE OF FREEDOM; MICRO MIRROR; MICRO-MACHINED; SINGLE DEGREE OF FREEDOMS; VOLTAGE-CONTROLLED;

ELECTROSTATIC ACTUATORS;

EID: 10944253276     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EEEI.2000.924457     Document Type: Conference Paper

References (7)

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3. L.J. Hombeck, SPIE Critical Review Series, Vol. 1150, pp. 86-102, 1989.
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6. R.K. Gupta, Ph.D. Thesis, MIT, June, 1997.
7. Yael Nemirovsky and O. Bochobza-Degani, "A general thermodynamical approach for modeling the pull-in parameters of electrostatic actuators", in preperation.