Polymeric magnetic microactuator with efficient permalloy loop design

Microsystem Technologies

Volumn 11, Issue 1, 2005, Pages 1-10

  Pan, C T ^a  

^a NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

Author keywords

Electromagnetic; Electroplate; Excimer laser ablation; Microactuator; Permalloy; Planar coil

Indexed keywords

ELECTRIC COILS; ELECTROMAGNETISM; ETCHING; EXCIMER LASERS; LASER ABLATION; MAGNETIZATION;

ELECTROPLATES; EXCIMER LASER ABLATION; PERMALLOY; PLANAR COILS;

MICROACTUATORS;

EID: 10844296536     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-004-0410-7     Document Type: Article

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