SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Materials Science and Engineering: B

Volumn 114-115, Issue SPEC. ISS., 2004, Pages 386-389

The atomic site of as implanted in Si at ultra-low energies

(3) D'Acapito, F a Maurizio, C a Malvestuto, M b

a EUROPEAN SYNCHROTRON RADIATION FACILITY (France)

b UNIVERSITY OF BOLOGNA (Italy)

Author keywords

Arsenic; Doping and impurity implantation; Extended X ray absorption fine structure (EXAFS); Silicon

Indexed keywords

ARSENIC; DATA REDUCTION; DOPING (ADDITIVES); HEATING; PROBABILITY; SEMICONDUCTOR JUNCTIONS; SILICON; X RAY ANALYSIS;

ATOMIC ENVIRONMENT; DOPING AND IMPURITY IMPLANTATION; EXTENDED X RAY ABSORPTION FINE STRUCTURE (EXAFS); LOW ENERGY;

ION IMPLANTATION;

EID: 10844255949 PISSN: 09215107 EISSN: None Source Type: Journal
DOI: 10.1016/j.mseb.2004.08.001 Document Type: Conference Paper

Times cited : (8)

References (25)

1
- 0019021929
- M. Tsai, F. Morehead, E. Baglin, J. Appl. Phys. 51 (1980) 3230.
- (1980) J. Appl. Phys. , vol.51 , pp. 3230
- Tsai, M.¹ Morehead, F.² Baglin, E.³

2
- 21544458253
- A. Lietoila, J. Gibbons, T. Sigmon, Appl. Phys. Lett. 36 (1980) 765.
- (1980) Appl. Phys. Lett. , vol.36 , pp. 765
- Lietoila, A.¹ Gibbons, J.² Sigmon, T.³

3
- 0012321110
- A. Nylandsted-Larsen, K. Kyllesbech-Larsen, P. Andersen, B. Svensson, J. Appl. Phys. 73 (1993) 691.
- (1993) J. Appl. Phys. , vol.73 , pp. 691
- Nylandsted-Larsen, A.¹ Kyllesbech-Larsen, K.² Andersen, P.³ Svensson, B.⁴

4
- 0000657992
- D. Nobili, S. Solmi, A. Pairsini, M. Derdour, A. Artigliato, L. Moro, Phys. Rev. B 49 (1994) 2477.
- (1994) Phys. Rev. B , vol.49 , pp. 2477
- Nobili, D.¹ Solmi, S.² Pairsini, A.³ Derdour, M.⁴ Artigliato, A.⁵ Moro, L.⁶

5
- 0025247636
- S. Hirota, M. Miyake, S. Nakayama, E. Arai, J. Electrochem. Soc. 317 (1990) 318.
- (1990) J. Electrochem. Soc. , vol.317 , pp. 318
- Hirota, S.¹ Miyake, M.² Nakayama, S.³ Arai, E.⁴

6
- 0001572772
- D.J. Chadi, P. Citrin, C. Park, D.L. Adler, M. Marcus, H. Gossmann, Phys. Rev. Lett. 79 (1997) 4834.
- (1997) Phys. Rev. Lett. , vol.79 , pp. 4834
- Chadi, D.J.¹ Citrin, P.² Park, C.³ Adler, D.L.⁴ Marcus, M.⁵ Gossmann, H.⁶

7
- 0000711874
- K. Pandey, A. Erbil, G.C. Cargill III, R. Boheme, Phys. Rev. Lett. 61 (1988) 1282.
- (1988) Phys. Rev. Lett. , vol.61 , pp. 1282
- Pandey, K.¹ Erbil, A.² Cargill III, G.C.³ Boheme, R.⁴

8
- 0001547107
- J.L. Allain, J.R. Regnard, A. Bourret, A. Parisini, A. Armigliato, G. Tourillon, S. Pizzini, Phys. Rev. B 46 (1992) 9434.
- (1992) Phys. Rev. B , vol.46 , pp. 9434
- Allain, J.L.¹ Regnard, J.R.² Bourret, A.³ Parisini, A.⁴ Armigliato, A.⁵ Tourillon, G.⁶ Pizzini, S.⁷

9
- 0344597193
- A. Herrera-Gómez, P. Rousseau, G. Materlik, J.W.T. Kendelewicz, P.B. Griffin, J. Plummer, E. Spicer, Appl. Phys. Lett. 68 (1996) 3090.
- (1996) Appl. Phys. Lett. , vol.68 , pp. 3090
- Herrera-Gómez, A.¹ Rousseau, P.² Materlik, G.³ Kendelewicz, J.W.T.⁴ Griffin, P.B.⁵ Plummer, J.⁶ Spicer, E.⁷

10
- 0037061213
- V. Ranki, J. Nissil, K. Saarinen, Phys. Rev. Lett. 88 (2002) 105506.
- (2002) Phys. Rev. Lett. , vol.88 , pp. 105506
- Ranki, V.¹ Nissil, J.² Saarinen, K.³

11
- 0035886246
- S. Whelan, V. Privitera, G. Mannino, M. Italia, C. Buongiomo, A.L. Magna, E. Napoletani, J. Appl. Phys. 90 (2001) 3873.
- (2001) J. Appl. Phys. , vol.90 , pp. 3873
- Whelan, S.¹ Privitera, V.² Mannino, G.³ Italia, M.⁴ Buongiomo, C.⁵ Magna, A.L.⁶ Napoletani, E.⁷

12
- 35949022427
- P. Lee, P. Citrin, P. Eisenberger, B. Kincaid, Rev. Mod. Phys. 53 (1981) 769.
- (1981) Rev. Mod. Phys. , vol.53 , pp. 769
- Lee, P.¹ Citrin, P.² Eisenberger, P.³ Kincaid, B.⁴

13
- 0001205742
- A. Erbil, W. Weber, G.C. Cargill III, R. Boheme, Phys. Rev. B 34 (1986) 1392.
- (1986) Phys. Rev. B , vol.34 , pp. 1392
- Erbil, A.¹ Weber, W.² Cargill III, G.C.³ Boheme, R.⁴

14
- 6144223849
- E. Canova, Y. Cao, T. Marshall, E. Arnold, Phys. Rev. B 39 (1989) 3131.
- (1989) Phys. Rev. B , vol.39 , pp. 3131
- Canova, E.¹ Cao, Y.² Marshall, T.³ Arnold, E.⁴

15
- 0009313226
- G. Greaves, A. Dent, B. Dobson, S. Kalbitzer, S. Pizzini, G. Muller, Phys. Rev. B 45 (1992) 6517.
- (1992) Phys. Rev. B , vol.45 , pp. 6517
- Greaves, G.¹ Dent, A.² Dobson, B.³ Kalbitzer, S.⁴ Pizzini, S.⁵ Muller, G.⁶

16
- 0038476316
- F. d'Acapito, I. Davoli, P. Ghigna, S. Mobilio, J. Synchrotron Rad. 10 (2003) 260.
- (2003) J. Synchrotron Rad. , vol.10 , pp. 260
- D'Acapito, F.¹ Davoli, I.² Ghigna, P.³ Mobilio, S.⁴

17
- 0030520353
- S. Pascarelli, F. Boscherini, F. d'Acapito, J. Hrdy, C. Meneghini, S. Mobilio, J. Synchrotron Rad. 3 (1996) 147.
- (1996) J. Synchrotron Rad. , vol.3 , pp. 147
- Pascarelli, S.¹ Boscherini, F.² D'Acapito, F.³ Hrdy, J.⁴ Meneghini, C.⁵ Mobilio, S.⁶

18
- 35949006418
- M. Newville, P. Livins, Y. Yacoby, E.A. Stern, J.J. Rehr, Phys. Rev. B 47 (1993) 14126.
- (1993) Phys. Rev. B , vol.47 , pp. 14126
- Newville, M.¹ Livins, P.² Yacoby, Y.³ Stern, E.A.⁴ Rehr, J.J.⁵

19
- 0542395209
- A. Ankudinov, B. Ravel, J. Rehr, S. Conradson, Phys. Rev. B 58 (1998) 7565-7576.
- (1998) Phys. Rev. B , vol.58 , pp. 7565-7576
- Ankudinov, A.¹ Ravel, B.² Rehr, J.³ Conradson, S.⁴

20
- 0035288601
- M. Newville, J. Synchrotron Rad. 8 (2001) 322.
- (2001) J. Synchrotron Rad. , vol.8 , pp. 322
- Newville, M.¹

21
- 0038183827
- S. Colonna, A. Terrasi, S. Scalese, F. Iacona, V. Raineri, F. La Via, S. Mobilio, Surf. Sci. 232-235 (2003) 746.
- (2003) Surf. Sci. , vol.232-235 , pp. 746
- Colonna, S.¹ Terrasi, A.² Scalese, S.³ Iacona, F.⁴ Raineri, V.⁵ La Via, F.⁶ Mobilio, S.⁷

22
- 85165486426
- Ph.D. Thesis, Universita' di Padova
- C. Maurizio, Ph.D. Thesis, Universita' di Padova, 2001.
- (2001)
- Maurizio, C.¹

23
- 0000135373
- F. Bechstedt, W. Harrison, Phys. Rev. B 39 (1989) 5041.
- (1989) Phys. Rev. B , vol.39 , pp. 5041
- Bechstedt, F.¹ Harrison, W.²

24
- 4243541671
- J. Knights, T. Hayes, J. Mikkelsen, Phys. Rev. Lett. 39 (1977) 712.
- (1977) Phys. Rev. Lett. , vol.39 , pp. 712
- Knights, J.¹ Hayes, T.² Mikkelsen, J.³

25
- 7544220968
- R. Ramamoorthy, S. Pantelides, Phys. Rev. Lett. 76 (1996) 4753.
- (1996) Phys. Rev. Lett. , vol.76 , pp. 4753
- Ramamoorthy, R.¹ Pantelides, S.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.