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Volumn 474, Issue 1-2, 2005, Pages 250-254

Electron backscattered diffraction analysis of copper damascene interconnect for ultralarge-scale integration

Author keywords

Anisotropy; Copper; Metallization; Nanostractures

Indexed keywords

ANISOTROPY; CHEMICAL MECHANICAL POLISHING; COPPER; CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; ELECTRODEPOSITION; ELECTROMAGNETIC WAVE BACKSCATTERING; ELECTROMAGNETIC WAVE DIFFRACTION; METALLIZING; NANOSTRUCTURED MATERIALS; SINGLE CRYSTALS;

EID: 10844246434     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.08.141     Document Type: Article
Times cited : (22)

References (12)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.