Hybrid replication development for construction of polymeric devices

Microsystem Technologies

Volumn 10, Issue 10, 2004, Pages 711-715

  Malek, C Khan ^a   Thuillier, G ^a   Blind, P ^b  

^a FEMTO ST INSTITUTE   (France)

^b Ctr Transfert Microtechnologies   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTOMERS; FABRICATION; FLUIDICS; HEAT TREATMENT; LARGE SCALE SYSTEMS; PHOTOLITHOGRAPHY; PIEZOELECTRICITY;

HYBRID REPLICATION DEVELOPMENT; IMPRINTING TECHNIQUES; INTEGRATED MICROVALVES; POLYMERIC DEVICES;

POLYMETHYL METHACRYLATES;

EID: 10844222716     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-004-0421-4     Document Type: Conference Paper

References (13)

1. Becker H; Locascio LE; Kutter J-P (2002) Polymer microfluidic devices. Miniaturization in analytical chemistry. Talanta. 56(2): 267-287
2. Duffy DC; McDonald IQ Schueller OJA; Whitesides GM (1998) Rapid Prototyping of Microfluidic Systems in Poly(dimethylsiloxane). Anal. Chem. 70(23): 4974-4984
3. Duffy DC; Schueller OJA; Brittain ST; Whitesides GM (1999) Rapid prototyping of microfluidic switches in poly(dimethyl siloxane) and their actuation by electro-osmotic flow. J Micromech Microeng 9: 211-217
4. Fujii T (2002) PDMS-based microfluidic devices for biomedical applications. Microelectronic Eng 61-62: 907-914.
5. Hosokawa K; Maeda R (2000) A pneumatically-actuated three-way microvalve fabricated with polydimethylsiloxane using the membrane transfer technique, J Micromech Microeng 10: 415-420.
6. Jeon NL; Chiu DT; Wargo CJ; Wu H; Choi IS; Anderson JR;Whitesides GM (2002) Design and fabrication of integrated passive valves and pumps for flexible polymer 3-dimensional microfluidic systems. Biomedical Microdevices 4(2): 117-121
7. Jo BH; Van Lerberghe LM; Motsegood KM; Beebe DJ (2000). Three-dimensional micro-channel fabrication in polydimethylsiloxane (PDMS) elastomer. J Microelectromech Sys 9(1): 76-81
8. Junker D; Schmid H; Bernard A; Caelen I; Michel B; de Rooij N; Delamarche E (2001) Soft and rigid two-level microfluidic networks for patterning surfaces. J Micromech Microeng 11: 532-541
9. Thorsen T; Maerkl SJ; Quake SR (2002) Microfluidic large-scale integration. Science 298: 580-584
10. Unger MA; Chou H-P; Thorsen T; Scherer A; Quake SR (2000) Monolithic microfabricated valves and pumps by multiplayer soft lithography. Science 288: 113-116
11. Yamaguichi A; Jin P; Tsuchiyama H; Masuda T; Sun K; Matsuo S; Misawa H (2002) Rapid fabrication of electrochemical enzyme sensor chip using polydimethylsiloxane microfluidic channel. Analytica Chimica Acta 486: 143-152
12. Yang X; Grosjean C Tai Y-C; Ho (1998) C-M A MEMS thermopneumatic silicone rubber membrane valve. Sensors and Actuators A64: 101-108
13. Xia Y; Whitesides GM (1998) Soft Lithography. Annual Review of Materials Science 28: 153-184