Novel flexible and thin capacitors with Mn-doped SrTiO3 thin films on polyimide films

Proceedings - Electronic Components and Technology Conference

Volumn 1, Issue , 2004, Pages 271-276

  Yamamichi, Shintaro ^a   Shibuya, Akinobu ^a  

^a NEC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DOPING (ADDITIVES); MANGANESE; PLASTIC FILMS; POLYIMIDES; SPUTTER DEPOSITION; STRONTIUM COMPOUNDS; THERMAL EXPANSION; THIN FILMS;

DEPOSITION TEMPERATURE; THIN CAPACITORS; THIN FILM PROCESS TECHNOLOGIES;

CAPACITORS;

EID: 10444247338     PISSN: 05695503     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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