Characterization of thin film tantalum oxide capacitors on polyimide substrates

IEEE Transactions on Advanced Packaging

Volumn 22, Issue 3, 1999, Pages 499-509

  Morcan, Gabriel ^a  

^a 3202 Bell Engineering Center   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT VOLTAGE CHARACTERISTICS; POLYIMIDES; TANTALUM; THIN FILMS;

TANTALUM OXIDE CAPACITORS;

CAPACITORS;

EID: 0033342842     PISSN: 15213323     EISSN: None     Source Type: Journal    
DOI: 10.1109/6040.784504     Document Type: Article

References (6)

1. H. Yoshino, T. Ihara, S. Yamanak, and T. Igarashi, "Tantalum oxide thinfilm capacitor suitable for being incorporated into an integrated circuit package," in Proc. 6th IEEE/CHMT Int. Electron. Manufact. Technol. Symp, Japan, 1989, pp. 156-159.
2. K. Fairchild, G. Morcan, T. Lenihan, W. Brown, L. Schaper, S. Ang, W. Sommers, J. Parkerson, and M. Glover, "Thin-film embedded resistors and electrical characterization of thin-film embedded capacitors and inductors," in Proc. 47th Electron. Comp. Technol. Conf., 1997, pp. 730-738.
3. K. Chen, M. Nielsen, S. Soss, E. Rymaszewski, T. M. Lu, and C. Wan, "Study of tantalum oxide film capacitors on metallized polymer sheets for advantaged packaging applications," IEEE Trans. Comp., Packag., Manufact. Technol., vol. 20, pp. 117-122, May 1997.
4. W. T. Liu, S. Cochrane, X. M. Wu, P. K. Singh, X. Zhang, D. B. Knorr, J. F. McDonald, E. J. Rymaszewski, J. M. Borrego, and T. M. Lu, "Frequency domain (1 kHzM) GHz) characterization of thin films for multichip module packaging technology," Electron. Lett., vol. 30, no. 2, pp. 117-118, 1994.
5. C. Morcan, S. S. Ang, T. G. Lenihan, L. W. Schaper, J. P. Parkerson, and W. D. Brown, "Electrical characterization of thin film integral passive devices on polyimide-based packaging structures," Int. J. Microcirc. Electron. Packag., vol. 21, no. 4, pp. 306-315, 1998.
6. C. P. Bean, J. C. Fisher, and D. A. Vermilyea, "Ionic conductivity of tantalum oxide at very high fields," Phys. Rev., vol. 101, no. 2, pp. 551-554, 1956.