High-Capacitance Thin-Film Capacitors on a Polymer Film

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 12, 2003, Pages 7432-7435

  Mori, Toru ^a   Shibuya, Akinobu ^a   Yamamichi, Shintaro ^a  

^a NEC CORPORATION   (Japan)

Author keywords

Capacitor; Decoupling; Low inductance; Polymer; PZT; Thin film

Indexed keywords

ANNEALING; CAPACITANCE; CAPACITORS; CRYSTALLIZATION; ELECTRIC INSULATION; ELECTRIC RESISTANCE; INDUCTANCE; MAGNETRON SPUTTERING; PERMITTIVITY; POLYMERS; SOL-GELS; X RAY DIFFRACTION ANALYSIS;

DECOUPLING CAPACITORS; LOW INDUCTANCE; PZT;

THIN FILM DEVICES;

EID: 1242287972     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.7432     Document Type: Article

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