Surface morphology of sputtered NiTi-based shape memory alloy thin films

Surface and Coatings Technology

Volumn 190, Issue 2-3, 2005, Pages 400-405

  Huang, Xu ^a   Liu, Yong ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

AFM; Magnetron deposition; Roughness; Shape memory alloy; Thin film

Indexed keywords

ANNEALING; ATOMIC FORCE MICROSCOPY; MORPHOLOGY; SPUTTER DEPOSITION; SURFACE ROUGHNESS; SURFACES; THIN FILMS;

ATOMIC FORCE MCIROSCOPES;

SHAPE MEMORY EFFECT;

COATING;

EID: 10244230957     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2004.02.029     Document Type: Article

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