Composition control of NiTi shape memory alloy films formed by sputter deposition with a composite target

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 39, Issue 10, 2000, Pages 5992-5994

  Takeda, Fumio ^a   Yamazaki, Toshinari ^b   Nakajima, Takayoshi ^a  

^a TOYAMA NATIONAL COLLEGE OF TECHNOLOGY   (Japan)

^b UNIVERSITY OF TOYAMA   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BENDING STRENGTH; COMPOSITION; ELECTROMAGNETS; ENERGY DISPERSIVE SPECTROSCOPY; MAGNETRON SPUTTERING; PRESSURE EFFECTS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SHAPE MEMORY EFFECT; SOLENOIDS; SPUTTER DEPOSITION; X RAY ANALYSIS; X RAY DIFFRACTION ANALYSIS;

COMPOSITION CONTROL; GAS PRESSURE; NICKEL TITANIUM ALLOY;

NICKEL ALLOYS;

EID: 0034291399     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.39.5992     Document Type: Article

References (9)

1. S. Miyazaki and A. Ishida: Mater. Trans. JIM 35 (1994) 14.
2. J. D. Busch, A. D. Johnson, C. H. Lee and D. A. Stevenson: J. Appl. Phys. 68 (1990) 6224.
3. F. E. Wang, W. J. Buehler and S. T. Pickert: J. Appl. Phys. 36 (1965) 3232.
4. A. Ishida, A. Takei and S. Miyazaki: Thin Solid Films 228 (1993) 210.
5. F. Takeda and T. Nakajima: Thin Solid Films 316 (1998) 68.
6. S. Takabayashi, K. Tanino, S. Fukumoto, Y. Mimatsu, S. Yamashita and Y. Ichikawa: Jpn. J. Appl. Phys. 35 (1996) 200.
7. T. Takahashi, N. Ikeda and M. Naoe: IEEE Trans. Magn. 26 (1990) 1611.
8. A. Ohta, I. Kishimoto and A. Umeda: read at Annu. Meet. Jpn. Soc. Mech. Eng., Tokyo, Hovember, 1998, No. 98-32, 287.
9. M. Bendahn, J. L. Seguin, P. Canel and H. Carchano: Thin Solid Films 283 (1996) 61.