Dual-technology optical sensor head for 3D surface shape measurements on the micro and nano-scales

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5457, Issue , 2004, Pages 168-174

  Artigas, Roger ^a   Laguarta, Ferran ^a   Cadevall, Cristina ^a  

^a UNIVERSITAT POLITÈCNICA DE CATALUNYA   (Spain)

Author keywords

Confocal profiler; Optical surface metrology; PSI; Shape measurement; White light interferometry

Indexed keywords

IMAGING TECHNIQUES; INSPECTION; INTERFEROMETERS; INTERFEROMETRY; SURFACE TOPOGRAPHY;

CONFOCAL PROFILER; OPTICAL SURFACE METROLOGY; PSI; SHAPE MEASUREMENTS; WHITE LIGHT INTERFEROMETRY;

OPTICAL SENSORS;

EID: 10044252009     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.545701     Document Type: Conference Paper

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