Micromeasurements on smooth surfaces with a new confocal optical profiler

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3520, Issue , 1998, Pages 149-160

  Laguarta, F ^a   Artigas, R ^a   Pinto, A ^a   Al Khastib, I ^a  

^a UNIVERSITAT POLITÈCNICA DE CATALUNYA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; CHARGE COUPLED DEVICES; COMPUTER CONTROL SYSTEMS; IMAGE PROCESSING; IMAGE QUALITY; LIGHT REFLECTION; NONLINEAR OPTICS; OPTICAL MICROSCOPY; SURFACE MEASUREMENT; SURFACE TOPOGRAPHY;

CONFOCAL MICROSCOPY; CONFOCAL OPTICAL PROFILERS; MICROMEASUREMENTS;

OPTICAL VARIABLES MEASUREMENT;

EID: 0032278305     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (11)