Development of confocal-based techniques for shape measurements on structured surfaces containing dissimilar materials

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5144, Issue , 2003, Pages 206-217

  Cadevall, Cristina ^a   Artigas, Roger ^a   Laguarta, Ferran ^a  

^a UNIVERSITAT POLITÈCNICA DE CATALUNYA   (Spain)

Author keywords

Confocal profiler; Dissimilar materials; Microelectronics; Non contact surface metrology; Optical profiler; Shape measurement

Indexed keywords

DISSIMILAR MATERIALS; IMAGING SYSTEMS; OPTICAL MICROSCOPY; PHOTORESISTS; REFRACTIVE INDEX; SEMICONDUCTING SILICON; SEMICONDUCTING SILICON COMPOUNDS; THICKNESS MEASUREMENT;

CONFOCAL BASED TECHNIQUES; CONFOCAL PROFILERS; OPTICAL IMAGING PROFILERS; SHAPE MEASUREMENTS; STRUCTURED SURFACES;

SURFACE MEASUREMENT;

EID: 0141720564     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.500470     Document Type: Conference Paper

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