Three-dimensional micromeasurements on smooth and rough surfaces with a new confocal optical profiler

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3824, Issue , 1999, Pages 93-104

  Artigas, Roger ^a   Pintó, Agustí ^a   Laguarta, Ferran ^a  

^a UNIVERSITAT POLITÈCNICA DE CATALUNYA   (Spain)

Author keywords

confocal microscopy; industrial inspection; micromeasuremen; optical profiler; urface metrology

Indexed keywords

CHARGE COUPLED DEVICES; CONFOCAL MICROSCOPY; IMAGE PROCESSING; OPTICAL SYSTEMS; OPTICAL TESTING; SURFACE MEASUREMENT; SURFACE TOPOGRAPHY; UNITS OF MEASUREMENT; DIFFRACTION GRATINGS; IMAGE ANALYSIS; INSPECTION; LIGHT REFLECTION; MICROSTRUCTURE; OPTICAL MICROSCOPY; THREE DIMENSIONAL;

CERTIFIED CALIBRATION STANDARDS; COMPUTER-CONTROLLED SYSTEMS; HIGH NUMERICAL APERTURE OPTICAL SYSTEMS; HIGH-PRECISION OPTICAL SURFACES; INDUSTRIAL INSPECTIONS; MICROMEASUREMEN; OPTICAL PROFILER; SPATIAL RESOLUTION;

OPTICAL DATA PROCESSING; OPTICAL INSTRUMENTS;

CONFOCAL MICROSCOPY; MICROMEASUREMENT; OPTICAL PROFILER;

EID: 0033339183     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.364243     Document Type: Conference Paper

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