X-ray characterization of oriented β-tantalum films

Thin Solid Films

Volumn 469-470, Issue SPEC. ISS., 2004, Pages 404-409

  Kohli, Sandeep ^a   McCurdy, Patrick R ^a   Rithner, Christopher D ^a   Dorhout, Peter K ^a   Dummer, Ann M ^b   Brizuela, Fernando ^b   Menoni, Carmen S ^b  

^a Department of Environmental and Radiological Health Sciences   (United States)

^b Department of Mechanical Engineering   (United States)

Author keywords

Sputtering; Tantalum; X ray diffraction; X ray photoelectron spectroscopy; X ray reflectivity

Indexed keywords

ADHESION; BINDING ENERGY; COMPOSITION; COMPUTER SIMULATION; DEPOSITION; INTERFACES (MATERIALS); ION BEAMS; SILICA; SPUTTERING; TANTALUM COMPOUNDS; THIN FILMS; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

CRYSTALLOGRAPHIC PLANES; INTERFACE LAYERS; TANTALUM METAL THIN FILMS; X-RAY REFLECTIVITY (XRR);

METALLIC FILMS;

EID: 10044237787     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.09.001     Document Type: Article

References (26)

1. S.P. Murarka, S.W. Hymes, Crit. Rev. Solid State 20 (1995) 87.
2. C. Ryu, K.W. Kwon, A.L.S. Loke, H. Lee, T. Nogami, V.M. Dubin, R.A. Kavari, G.W. Ray, S.S. Wong, IEEE Trans. Electron Devices 46 (1999) 1113.
3. K.V. Kwon, C. Ryu, R. Sinclair, S.S. Wong, Appl. Phys. Lett. 71 (1997) 3069.
4. S.L. Lee, D. Windover, T.M. Lu, M. Audino, Thin Solid Films 420 (2002) 287.
5. J.H. Wang, L.J. Chen, Z.C. Lu, C.S. Hsiung, W.Y. Hsieh, T.R. Yew, J. Vac. Sci. Technol., B 20 (2002) 1522.
6. L. Gladczuk, C. Joshi, A. Pater, J. Guiheen, Z. Iqbal, M. Sosnowski, Materials Research Society Symposia Proceedings, 2003, p. FF7.2.1.
7. P.N. Baker, Thin Solid Films 14 (1972) 3.
8. A.Q. Jiang, A. Yohannan, N.O. Nnolim, T.A. Tyson, L. Axe, S.L. Lee, P. Cote, Thin Solid Films 437 (2003) 116.
9. C. Montcalm, S.M. Lee, D. Burtner, A. Dummer, D. Siegfried, I. Wagner, M. Watanabe, Annual Technical Conference Proceeding -Society of Vacuum Coaters, 2002, p. 245.
10. S. Kohli, J.A. Thail, R.D. Snyder, C.D. Rithner, P.K. Dorhout, J. Vac. Sci. Technol., B 21 (2003) 719.
11. S. Kohli, C.D. Rithner, P.K. Dorhout, J. Appl. Phys. 91 (2002) 1149.
12. Powder Diffraction File, Joint Committee on Powder Diffraction Standards - International Centre for Diffraction Data, Newton Square, PA., Card No. 25-1280.
13. Powder Diffraction File, Joint Committee on Powder Diffraction Standards - International Centre for Diffraction Data, Newton Square, PA., Card No. 43-1046.
14. H. Kiessig, Ann. Phys. 10 (5) (1931) 769.
15. V.P. Holy, U. Pietsch, T. Baumbach, High-Resolution X-ray Scattering from Thin Films and Multilayers, Springer-Verlag, Berlin, 1999.
16. B.L. Henke, E.M. Gullikson, J.C. Davis, At. Data Nucl. Data Tables 54 (1993) 181.
17. D. Briggs, M.P. Seah (Eds.), Practical Surface Analysis: Auger and X-Ray Photoelectron Spectroscopy, John Wiley and Sons, 1996.
18. J.F. Vanderveen, F.J. Himpsel, D.E. Eastman, Phys. Rev., B 25 (1982) 7388.
19. C.D. Wagner, A.V. Naumkin, A. Kraut-Vass, J.W. Allison, C.J. Powell, J.R. Rumble Jr., NIST Standard Reference Database 20, Version 3.4 (Web Version), National Institute of Standards and Technology, Gaithersburg, MD, 2000.
20. B.V. Crist, Handbook of Monochromatic XPS Spectra Semiconductors, John Wiley and Sons, West Sussex, UK, 2000, p. 356.
21. M. Zier, S. Oswald, R. Reiche, K. Wetzig, Anal. Bioanal. Chem. 375 (2003) 902.
22. X. Zhao, N.P. Magtoto, M. Leavy, J.A. Kelber, Thin Solid Films 415 (2002) 308.
23. B.R. Chakraborty, S. Hofmann, Thin Solid Films 204 (1991) 163.
24. C.J. Powell, A. Jablonski, I.S. Tilinin, S. Tanuma, D.R. Penn, J. Electron. Spectrosc. 99 (1999) 1.
25. J.F. Moulder, W.F. Stickle, P.E. Sobol, K.D. Bomben, W.F. Stickle, P.E. Sobol, K.D. Bomben, Handbook of X-ray Photoelectron Spectroscopy - A Reference Book of Standard Spectra for Identification and Interpretation of XPS Data, Physical Electronics, Eden Prairie, MN, 1995.
26. C.J. Powell, A. Jablonski, NIST Electron Inelastic-Mean-Free-Path Database - Version 1.1, National Institute of Standards and Technology, Gaitheiburg, MD, 2000.