Synthesis of cubic boron nitride film by inductively coupled plasma CVD technique

Journal of Physics D: Applied Physics

Volumn 37, Issue 2, 2004, Pages 261-268

  Chowdhury, M Pal ^a   Pal, A K ^a  

^a DEPARTMENT OF MATERIALS SCIENCE   (India)

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIA; ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; CUBIC BORON NITRIDE; ELLIPSOMETRY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; INDUCTIVELY COUPLED PLASMA; INTERFACES (MATERIALS); OPTICAL PROPERTIES; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; SYNTHESIS (CHEMICAL);

BORANE-AMMONIA; CUBIC BORON NITRIDE FILM; INDUCTIVELY COUPLED PLASMA CHEMICAL VAPOR DEPOSITION; OPTICAL CONSTANTS;

THIN FILMS;

EID: 0942290155     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/37/2/015     Document Type: Article

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