A novel double RESURF LDMOS for HVIC's

Microelectronics Journal

Volumn 35, Issue 3, 2004, Pages 305-310

  Hardikar, S ^a   De Souza, M M ^a   Xu, Y Z ^a   Pease, T J ^a   Sankara Narayanan, E M ^a  

^a DE MONTFORT UNIVERSITY   (United Kingdom)

Author keywords

CMOS; Double RESURF; High voltage; LDMOS

Indexed keywords

ANNEALING; COMPUTER SIMULATION; COST EFFECTIVENESS; DIFFUSION; ELECTRIC BREAKDOWN; ELECTRIC RESISTANCE; MOSFET DEVICES; NUMERICAL METHODS; OPTIMIZATION; SEMICONDUCTOR DOPING;

DOUBLE RESURF; DRIFT REGIONS; HIGH-VOLTAGE INTEGRATED CIRCUITS (HVIC);

INTEGRATED CIRCUITS;

EID: 0742303102     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2692(03)00190-3     Document Type: Conference Paper

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