Double resurf technology for HVICs

Electronics Letters

Volumn 32, Issue 12, 1996, Pages 1092-1093

  De Souza, M M ^a   Sankara Narayanan, E M ^a  

^a DE MONTFORT UNIVERSITY   (United Kingdom)

Author keywords

Integrated circuits; Power integrated circuits

Indexed keywords

COMPUTER SIMULATION; COMPUTER SIMULATION LANGUAGES; ELECTRIC BREAKDOWN; ELECTRIC RESISTANCE; ELECTRIC WIRING; INTEGRATED CIRCUITS; MOSFET DEVICES; PERFORMANCE; POWER ELECTRONICS; SEMICONDUCTOR DEVICE STRUCTURES;

HIGH VOLTAGE INTEGRATED CIRCUITS; INTERCONNECTION TECHNOLOGY; LINEARLY VARYING DOPED LAYER; SOFTWARE PACKAGE MEDICI;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0030572272     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:19960731     Document Type: Article

References (9)

1. KOISHIKAWA, Y., TAKAHASHI, M., YANAGIGAWA, H., and KUNYAMA, T.: 'Double resurf device technology for power ICs', NEC Res. Dev., 1994, 35, (4)
2. RUMENNIK, V.: 'A 1200V BiCMOS technology and its applications'. Proc. ISPSD, 1992, pp. 322-327
3. FUJISHIMA, N., and TAKEDA, H.: 'A novel field plate structure under high voltage interconnections'. Proc. ISPSD, 1990, pp. 91-96
4. MOK, P.K.T., and SALAMA, C.A.T.: 'Interconnect induced breakdown in HVICs'. Electrochem. Soc., Spring Meeting, 1989, Vol. 89-1,
5. SUGAWARA, Y., and KAMEI, T.: 'Field reduction regions for compact high voltage ICs', IEEE Trans. Electron. Devices, 1987, ED-34, pp. 1816-1821
6. FALCK, E., GERLACH, W., and KOREC, J.: 'Influence of Interconnections onto the breakdown voltage of planar high-voltage p-n junctions', IEEE Trans. Electron. Devices, 1993, ED-40, pp. 438-447
7. STENGL, R., and GOSELE, U.: 'Variation of lateral doping - A new concept to avoid high voltage breakdown of planar junctions'. IEDM Tech. Dig., 1985, pp. 154-157
8. MERCHANT, S., ARNOLD, E., BAUMGART, H., MUKHERJEE, S., PEIN, H., and PINKER. R.: 'Realisation of high breakdown voltage (>700 V) in thin SOI devices'. Proc. ISPSD, 1991, pp. 31-33
9. Medici V.2.0.2, Technologies Modelling Associates Inc., USA