Selective modification of the tribological properties of aluminum through temperature and dose control in oxygen plasma source ion implantation

Journal of Materials Research

Volumn 18, Issue 12, 2003, Pages 2779-2792

  Bolduc, M ^a   Terreault, B ^a   Reguer, A ^a   Shaffer, E ^a   St Jacques, R G ^a  

^a INRS EMT   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL MODIFICATION; ELASTIC MODULI; ELECTRON CYCLOTRON RESONANCE; ETCHING; FRICTION; HIGH TEMPERATURE EFFECTS; ION IMPLANTATION; MICROWAVES; NANOSTRUCTURED MATERIALS; OXYGEN; PLASMA SOURCES; PRECIPITATION (CHEMICAL); REDUCTION; TRIBOLOGY; X RAY PHOTOELECTRON SPECTROSCOPY;

DOSE CONTROL; NANOINDENTATION;

ALUMINUM;

EID: 0742284427     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.2003.0388     Document Type: Article

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