The pronounced grain size refinement at the edge position of the diamond-coated WC-Co inserts under microwave plasma with negative bias

Diamond and Related Materials

Volumn 12, Issue 10-11, 2003, Pages 1657-1662

  Park, Jong Kuek ^a   Lee, Wook Seong ^a   Baik, Young Joon ^a   Chae, Ki Woong ^b  

^a Korea Institute of Science and Technology   (South Korea)

^b Hoseo University   (South Korea)

Author keywords

DC bias; Diamond coated tools; Edge; Grain size refinement; MW PACVD

Indexed keywords

DIAMOND FILMS; GRAIN SIZE AND SHAPE; MICROWAVES; NUCLEATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

SURFACE DEFECTS;

DIAMONDS;

DIAMOND;

EID: 0348010223     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(03)00266-8     Document Type: Article

References (29)

1. Oakes J. Pan X.X. Haubner R. Lux B. Surf. Coat. Technol. 47 1991 600-607
2. Karner J. Pedrazzini M. Reineck I. Sjöstrand M.E. Berrmann E. Mater. Sci. Eng. A209 1996 405-413
3. Haubner R. Lux B. Int. J. Refract. Met. Hard Mater. 14 1996 111-118
4. Inspektor A. Oles E.J. Bauer C.E. Int. J. Refract. Met. Hard Mater. 15 1997 49
5. Shen C.-H. Key Eng. Mater. 138-140 1998 25
6. Klages C.-P. Fryda M. Matthée T. Schäfer L. Dimigen H. Int. J. Refract. Met. Hard Mater. 16 1998 176
7. Dilawar N. Kapil R. Brahamprakash Vankar V.D. Avasthi D.K. Kabiraj D., et-al. Thin Solid Films 323 1998 163
8. Tang W. Wang Q. Wang S. Lu F. Diamond Relat. Mater. 10 2001 1700
9. Silva S. Mammana V.P. Salvadori M.C. Monteiro O.R. Brown I.G. Diamond Relat. Mater. 8 1999 1913
10. Lin C.R. Kuo C.T. Chang R.M. Diamond Relat. Mater. 7 1998 1628
11. Haubner R. Lux B. Int. J. Refract. Met. Hard Mater. 14 1996 119-125
12. Fernandes A.J.S. Silva V.A. Carrapichano J.M. Dias G.R. Silva R.F. Costa F.M. Diamond Relat. Mater. 10 2001 803
13. Bühlmann S. Blank E. Haubner R. Lux B. Diamond Relat. Mater. 8 1999 194
14. Kang M.-S. Lee W.-S. Baik Y.-J. Thin Solid Films 398-399 2001 175
15. Zhou D. McCauley T.G. Qin L.C. Krauss A.R. Gruen D.M. J. Appl. Phys. 83 1998 540
16. Zhou D. Krauss A.R. Qin L.C. McCauley T.G. Gruen D.M. Corrigan D., et-al. J. Appl. Phys. 82 1997 4546
17. Corrigan T.D. Gruen D.M. Krauss A.R. Zapol P. Chang R.P.H. Diamond Relat. Mater. 11 2002 43
18. J.W. Zimmer, US Patent No. 6319 610, 20 Nov, 2001
19. Yeo S.-H. Lee W.-S. Baik Y.-J. Chae K.-W. Lim D.-S. J. Korean Ceram. Soc. 38 1 2001 28
20. Gu C.Z. Jiang X. J. Appl. Phys. 88 4 2000 1788
21. Jiang X. Zhang W.J. Klages C.-P. Phys. Rev. B 58 1998 7064
22. Zhang W.J. Jiang X. Xia Y.B. J. Appl. Phys. 82 1997 1896
23. Ager J.W. Drory M.D. Phys. Rev. B 48 1993 2601
24. Nishitani-Gamo M. Tachibana T. Kobashi K. Sakaguchi I. Loh K.P. Yamamoto K., et-al. Diamond Relat. Mater. 7 1998 783
25. Yugo S. Kanai T. Kimura T. Muto T. Appl. Phys. Lett. 58 10 1991 1036
26. Wolter S.D. Stoner B.R. Glass J.T. Ellis P.J. Buhaenko D.S. Jenkins C.E., et-al. Appl. Phys. Lett. 62 11 1993 1215
27. Wang B.B. Wang W.L. Liao K.J. Xiao J.L. Phys. Rev. B 63 2001 085412
28. Jiang N. Sugimoto K. Eguchi K. Inaoka T. Shintani Y. Makita H., et-al. J. Cryst. Growth 222 2001 591
29. POISSON/SUPERFISH Group of Codes, Los Alamos National Laboratory, Los Alamos, New Mexico