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Volumn 340-342, Issue , 2003, Pages 151-155
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Optical and magnetic resonance signatures of deep levels in semi-insulating 4H SiC
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Author keywords
EPR; Photoluminescence; Semi insulating; Silicon carbide
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Indexed keywords
CARBON;
CHEMICAL VAPOR DEPOSITION;
DEFECTS;
ENERGY GAP;
EPITAXIAL GROWTH;
HIGH TEMPERATURE EFFECTS;
HYDROGEN;
PARAMAGNETIC RESONANCE;
PHOTOLUMINESCENCE;
PHYSICAL VAPOR DEPOSITION;
POSITRON ANNIHILATION SPECTROSCOPY;
SILICON WAFERS;
THERMAL CONDUCTIVITY;
PHYSICAL VAPOR TRANSPORT (PVT) METHOD;
SEMI-INSULATING;
SILICON CARBIDE;
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EID: 0347764790
PISSN: 09214526
EISSN: None
Source Type: Journal
DOI: 10.1016/j.physb.2003.09.048 Document Type: Conference Paper |
Times cited : (56)
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References (15)
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