High-spatial-resolution semiconductor characterization using a microwave eddy current probe

Applied Physics Letters

Volumn 78, Issue 1, 2001, Pages 129-131

  Watson, C C ^a   Chan, Winston K ^b  

^a UNIVERSITY OF IOWA   (United States)

^b IA United States   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0347608488     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1337639     Document Type: Article

References (13)

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