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Volumn 67, Issue 3-4, 2002, Pages 491-499

Structure and chemistry of SiOx (x < 2) systems

Author keywords

[No Author keywords available]

Indexed keywords

INTERFACES (MATERIALS); ION BEAMS; OXIDATION; SILICON COMPOUNDS; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY; X RAY SPECTROSCOPY;

EID: 0037179750     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(02)00218-X     Document Type: Conference Paper
Times cited : (24)

References (24)
  • 3
    • 0003520079 scopus 로고
    • New York: Plenum Press, and references cited therein
    • 2 interface. New York: Plenum Press, 1988 and references cited therein.
    • (1988) 2 interface
    • Helms, C.R.1    Deal, B.E.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.