메뉴 건너뛰기




Volumn 145, Issue 1, 2004, Pages 99-108

Processing and characterization of diffusion-bonded Al-Si interfaces

Author keywords

Aluminum; Characterization; Diffusion bonding; Interface; Silicon

Indexed keywords

AMORPHOUS MATERIALS; BONDING; DIES; DIFFUSION; INTERFACES (MATERIALS); MORPHOLOGY; OPTICAL MICROSCOPY; PLASTIC DEFORMATION; RECRYSTALLIZATION (METALLURGY); SCANNING ELECTRON MICROSCOPY; SILICON; TEXTURES; TRANSMISSION ELECTRON MICROSCOPY;

EID: 0347354865     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-0136(03)00877-X     Document Type: Article
Times cited : (32)

References (23)
  • 1
    • 0035737142 scopus 로고    scopus 로고
    • Plastic deformation and interfacial sliding in Al and Cu thin film: Si substrate systems due to thermal cycling
    • Dutta I., Chen M.W., Peterson K., Shultz T. Plastic deformation and interfacial sliding in Al and Cu thin film: Si substrate systems due to thermal cycling. J. Electron. Mater. 30(12):2001;1537.
    • (2001) J. Electron. Mater. , vol.30 , Issue.12 , pp. 1537
    • Dutta, I.1    Chen, M.W.2    Peterson, K.3    Shultz, T.4
  • 2
    • 0036951203 scopus 로고    scopus 로고
    • Interfacial sliding in back-end interconnect structures in microelectronic devices
    • Peterson K.A., Park C., Dutta I. Interfacial sliding in back-end interconnect structures in microelectronic devices. Proc. MRS Symp. 716:2002;483.
    • (2002) Proc. MRS Symp. , vol.716 , pp. 483
    • Peterson, K.A.1    Park, C.2    Dutta, I.3
  • 3
    • 0033891797 scopus 로고    scopus 로고
    • Role of interfacial and matrix creep during thermal cycling of continuous fiber reinforced metal-matrix composites
    • Dutta I. Role of interfacial and matrix creep during thermal cycling of continuous fiber reinforced metal-matrix composites. Acta Mater. 48:2000;1055.
    • (2000) Acta Mater. , vol.48 , pp. 1055
    • Dutta, I.1
  • 4
    • 0002187405 scopus 로고    scopus 로고
    • Creep behavior of interfaces in continuous fiber reinforced metal-matrix composites
    • Funn J.V., Dutta I. Creep behavior of interfaces in continuous fiber reinforced metal-matrix composites. Acta Mater. 47:1999;149.
    • (1999) Acta Mater. , vol.47 , pp. 149
    • Funn, J.V.1    Dutta, I.2
  • 5
    • 0036836492 scopus 로고    scopus 로고
    • Measurement of creep kinetics at Al-Si interfaces
    • Peterson K.A., Dutta I., Chen M.W. Measurement of creep kinetics at Al-Si interfaces. Scripta Metall. 47:2002;649-654.
    • (2002) Scripta Metall. , vol.47 , pp. 649-654
    • Peterson, K.A.1    Dutta, I.2    Chen, M.W.3
  • 6
    • 0030869870 scopus 로고    scopus 로고
    • Micromechanical and tribological characterization of doped single-crystal silicon and polysilicon films for microelectromechanical systems devices
    • Bhushan B., Li X.D. Micromechanical and tribological characterization of doped single-crystal silicon and polysilicon films for microelectromechanical systems devices. J. Mater. Res. 12(1):1997;59.
    • (1997) J. Mater. Res. , vol.12 , Issue.1 , pp. 59
    • Bhushan, B.1    Li, X.D.2
  • 7
    • 0003917316 scopus 로고
    • ASM International, Metals Park, OH
    • ASM Metals Handbook, 9th ed., ASM International, Metals Park, OH, 1986, p. 65.
    • (1986) ASM Metals Handbook, 9th Ed. , pp. 65
  • 10
    • 0000633265 scopus 로고
    • Surface deformation and friction of metals at light loads
    • Whitehead J.R. Surface deformation and friction of metals at light loads. Proc. Roy. Soc. Lond. A. 201:1950;109.
    • (1950) Proc. Roy. Soc. Lond. A , vol.201 , pp. 109
    • Whitehead, J.R.1
  • 12
    • 0019069186 scopus 로고
    • Parameters in solid-state bonding of metals to oxide materials and the adherence of bonds
    • Klomp J.T., Van De Ven A.J.C. Parameters in solid-state bonding of metals to oxide materials and the adherence of bonds. J. Mater. Sci. 15:1980;2483.
    • (1980) J. Mater. Sci. , vol.15 , pp. 2483
    • Klomp, J.T.1    Van De Ven, A.J.C.2
  • 13
    • 0017555705 scopus 로고
    • The nucleation of recrystallization at second phase particles in deformed aluminum
    • Humphreys F.J. The nucleation of recrystallization at second phase particles in deformed aluminum. Acta Metall. 25:1977;1323.
    • (1977) Acta Metall. , vol.25 , pp. 1323
    • Humphreys, F.J.1
  • 14
    • 84974924077 scopus 로고
    • Microstructural development during thermomechanical processing of particulate metal-matrix composites
    • Humphreys F.J., Miller W.S., Djazeb M.R. Microstructural development during thermomechanical processing of particulate metal-matrix composites. Mater. Sci. Technol. 6:1990;1157.
    • (1990) Mater. Sci. Technol. , vol.6 , pp. 1157
    • Humphreys, F.J.1    Miller, W.S.2    Djazeb, M.R.3
  • 15
    • 0025437208 scopus 로고
    • The plasticity of particle containing poly-crystals
    • Humphreys F.J., Kalu P.N. The plasticity of particle containing poly-crystals. Acta Metall. 38:1990;917.
    • (1990) Acta Metall. , vol.38 , pp. 917
    • Humphreys, F.J.1    Kalu, P.N.2
  • 16
    • 0031334887 scopus 로고    scopus 로고
    • A unified theory of recovery, recrystallization and grain growth, based on the stability and growth of cellular microstructures. 2. The effect of second-phase particles
    • Humphreys F.J. A unified theory of recovery, recrystallization and grain growth, based on the stability and growth of cellular microstructures. 2. The effect of second-phase particles. Acta Mater. 45(12):1997;5031.
    • (1997) Acta Mater. , vol.45 , Issue.12 , pp. 5031
    • Humphreys, F.J.1
  • 17
    • 0000567696 scopus 로고
    • Structure and mechanism of bonding at a diffusion-bonded Al/SiC interface
    • Ratnaparkhi P.L., Howe J.M. Structure and mechanism of bonding at a diffusion-bonded Al/SiC interface. Acta Metall. Mater. 42(3):1994;811.
    • (1994) Acta Metall. Mater. , vol.42 , Issue.3 , pp. 811
    • Ratnaparkhi, P.L.1    Howe, J.M.2
  • 20
    • 0032689692 scopus 로고    scopus 로고
    • Gold films epitaxially grown by diffusion at the 3C-SiC/Si interface
    • Komninou P., Stoemenos J., Nouet G., Karakostas T. Gold films epitaxially grown by diffusion at the 3C-SiC/Si interface. J. Cryst. Growth. 203:1999;103.
    • (1999) J. Cryst. Growth , vol.203 , pp. 103
    • Komninou, P.1    Stoemenos, J.2    Nouet, G.3    Karakostas, T.4
  • 23
    • 0038147553 scopus 로고    scopus 로고
    • Diffusionally accommodated interfacial sliding in metal-silicon systems
    • Peterson K.A., Dutta I., Chen M.W. Diffusionally accommodated interfacial sliding in metal-silicon systems. Acta Mater. 51:2003;2831-2846.
    • (2003) Acta Mater. , vol.51 , pp. 2831-2846
    • Peterson, K.A.1    Dutta, I.2    Chen, M.W.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.