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Volumn 8, Issue 2, 2002, Pages 63-73

The influence of carbon precursors on the gas-phase chemistry of titanium carbide CVD

Author keywords

Carbon; Kinetics; Thermodynamics; Titanium carbide

Indexed keywords


EID: 0346985958     PISSN: 09481907     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-3862(20020304)8:2<63::AID-CVDE63>3.0.CO;2-J     Document Type: Article
Times cited : (6)

References (25)
  • 4
    • 0346559895 scopus 로고
    • Ed: P. A. Thrower, Marcel Dekker, New York Ch. 19 and 65
    • P. A. Tesner, in Chemistry and Physics of Carbon, (Ed: P. A. Thrower), Marcel Dekker, New York 1984, Ch. 19 and 65.
    • (1984) Chemistry and Physics of Carbon
    • Tesner, P.A.1
  • 15
    • 0346559894 scopus 로고
    • Stanford University, Stanford, CA
    • W. D. Reynolds, STANJAN, V.3 Stanford University, Stanford, CA 1986.
    • (1986) STANJAN, V.3
    • Reynolds, W.D.1
  • 21
    • 0347820185 scopus 로고
    • Ed: R. Porat, Iscar Ltd. Hardmetal Industrial Products, Nahariya, Israel
    • J. P. Piton, B. Ladouce, L. Vandenbulcke, Proc. VI Euro. Conf. CVD (Ed: R. Porat), Iscar Ltd. Hardmetal Industrial Products, Nahariya, Israel 1987, p. 120.
    • (1987) Proc. VI Euro. Conf. CVD , pp. 120
    • Piton, J.P.1    Ladouce, B.2    Vandenbulcke, L.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.