Chemistry and kinetics of chemical vapor deposition of pyrocarbon - V influence of reactor volume/deposition surface area ratio

Carbon

Volumn 36, Issue 3, 1998, Pages 225-232

  Becker, A ^a   Huttinger K J ^a  

^a UNIVERSITY OF KARLSRUHE   (Germany)

Author keywords

A. Pyrolytic carbon; B. chemical vapor deposition

Indexed keywords

EID: 0001618438     PISSN: 00086223     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0008-6223(97)00178-4     Document Type: Article

References (9)

1. Benzinger, W., Becker, A. and Hüttinger, K. J., Carbon, 1996, 34, 957.
2. Becker, A. and Hüttinger, K. J., Carbon, 1998, 36, 177.
3. Becker, A. and Hüttinger, K. J., Carbon, 1998, 36, 201.
4. Becker, A. and Hüttinger, K. J., Carbon, 1998, 36, 213.
5. Jeong, H. J., Park, H. D., Lee, J. D. and Park, J. O., Carbon, 1996, 34, 417.
6. Grisdale, R. O., Pfister, A. C. and Van Roosbroeck, W., Bell System Tech. J., 1951, 30, 271.
7. Benzinger, W. and Hüttinger, K. J., Carbon, 1997, in preparation.
8. Benzinger, W. and Hüttinger, K. J., German Patent Application No. 196460948, 1996.
9. Benzinger, W., Ph.D. thesis, University of Karlsruhe, Germany, in preparation.