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Volumn 145, Issue 6, 1998, Pages 2167-2178
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Thermodynamics and kinetics of gas-phase reactions in the Ti-Cl-H system
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
DECOMPOSITION;
HYDROGEN;
PHASE COMPOSITION;
PRESSURE EFFECTS;
REACTION KINETICS;
THERMODYNAMIC STABILITY;
GAS PHASE DECOMPOSITION;
TITANIUM CHLORIDE;
TITANIUM COMPOUNDS;
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EID: 0032095407
PISSN: 00134651
EISSN: None
Source Type: Journal
DOI: 10.1149/1.1838613 Document Type: Article |
Times cited : (33)
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References (53)
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