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Volumn 49, Issue 6, 2004, Pages 945-950
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Fabrication of three-dimensional Cu/Ni multilayered microstructure by wet process
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Author keywords
Copper; Nickel; Selective etching; Thiourea; Three dimensional microstructure
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Indexed keywords
COPPER;
ELECTROPLATING;
ETCHING;
FABRICATION;
MORPHOLOGY;
MULTILAYERS;
NICKEL;
PHOTOLITHOGRAPHY;
WETTING;
THREE-DIMENSIONAL MICROSTRUCTURES;
MICROSTRUCTURE;
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EID: 0346639335
PISSN: 00134686
EISSN: None
Source Type: Journal
DOI: 10.1016/j.electacta.2003.10.006 Document Type: Article |
Times cited : (14)
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References (13)
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