Single-material inhomogeneous optical filters based on microstructural gradients in plasma-deposited silicon nitride

Applied Optics

Volumn 43, Issue 1, 2004, Pages 97-103

  Vernhes, Richard ^a   Zabeida, Oleg ^a   Klemberg Sapieha, Jolanta E ^a   Martinu, Ludvik ^a  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; BANDPASS FILTERS; COMPOSITION; FILM GROWTH; HYDROGENATION; MICROSTRUCTURE; NATURAL FREQUENCIES; PLASMA DENSITY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PRESSURE; REFRACTIVE INDEX; SILICON NITRIDE;

DUAL MODE MICROWAVE RADIO FREQUENCY PECVD; GAS COMPOSITION; ION ENERGY; MECHANICAL RESISTANCE; PRESSURE CONSTANT; RADIO FREQUENCY; SINGLE MATERIAL INHOMOGENOUS OPTICAL FIBERS;

OPTICAL FILTERS;

EID: 0346639123     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.43.000097     Document Type: Article

References (28)

1. R. Jacobsson, "Light reflection from films of continuously varying refractive index," in Progress in Optics, E. Wolf, ed. (Elsevier North-Holland, Amsterdam, 1966), Vol. 5, pp. 247-286.
2. R. Jacobsson, "A review of the optical properties of inhomogeneous thin films," in Inhomogeneous and Quasi-Inhomogeneous Optical Coatings, P. G. Verly and J. A. Dobrowolski, eds., Proc. SPIE 2046, 2-8 (1993).
3. W. E. Johnson and R. L. Crane, "Introduction to rugate filter technology," in Inhomogeneous and Quasi-Inhomogeneous Optical Coatings, P. G. Verly and J. A. Dobrowolski, eds., Proc. SPIE 2046, 88-108 (1993).
4. B. Bovard, F. J. Van Milligen, M. J. Messerly, S. G. Saxe, and H. A. Macleod, "Optical constants derivation for an inhomogeneous thin film from in situ transmission measurements," Appl. Opt. 24, 1803-1807 (1985).
5. W. H. Southwell and R. L. Hall, "Rugate filter sidelobe suppression using quintic and rugated quintic matching layers," Appl. Opt. 28, 2949-2951 (1989).
6. S. Larouche, A. Amassian, S. C. Gujrathi, J. E. Klemberg-Sapieha, and L. Martinu, "Multilayer and inhomogeneous optical filters fabricated by PECVD using titanium dioxide and silicon dioxide," in Proceedings of the 44th Annual Technical Conference of the Society of Vacuum Coaters (Society of Vacuum Coaters, Albuquerque, N.Mex., 2001), pp. 277-281.
7. D. Rats, D. Poitras, J. M. Soro, L. Martinu, and J. von Stebut, "Mechanical properties of plasma-deposited silicon-based inhomogeneous optical coatings," Surf. Coat. Technol. 111, 220-228 (1999).
8. M. F. Ouellette, R. V. Lang, K. L. Yan, R. W. Bertram, and R. S. Owles, "Experimental studies of inhomogeneous coatings for optical applications," J. Vac. Sci. Technol. A 9, 1188-1192 (1991).
9. W. J. Gunning, R. L. Hall, F. J. Woodberry, W. H. Southwell, and N. S. Gluck, "Codeposition of continuous composition rugate filters," Appl. Opt. 28, 2945-2948 (1989).
10. L. Martinu and D. Poitras, "Plasma deposition of optical films and coatings: a review," J. Vac. Sci. Technol. A 18, 2619-2645 (2000).
11. D. Poitras, J. E. Klemberg-Sapieha, A. Moussi, and L. Martinu, "Properties of multilayer and graded index Si-based coatings deposited in dual-frequency plasma," in Inhomogeneous and Quasi-Inhomogeneous Optical Coatings, P. G. Verly and J. A. Dobrowolski, eds., Proc. SPIE 2046, 179-188 (1993).
12. D. Poitras, S. Larouche, and L. Martinu, "Design and plasma deposition of dispersion-corrected multiband rugate filters," Appl. Opt. 41, 5249-5255 (2002).
13. x films," Appl. Opt. 28, 2940-2944 (1989).
14. y films with graded refractive index profiles," J. Non-Cryst. Solids 187, 484-488 (1995).
15. G. K. Hubler, P. R. Malmberg, and T. P. Smith III, "Refractive index profiles and range distributions of silicon implanted with high-energy nitrogen," J. Appl. Phys. 50, 7147-7155 (1979).
16. B. F. Hanyaloglu and E. S. Aydil, "Low temperature plasma deposition of silicon nitride from silane and nitrogen plasmas," J. Vac. Sci. Technol. A 16, 2794-2803 (1998).
17. D. Poitras, P. Leroux, J. E. Klemberg-Sapieha, S. C. Gujrathi, and L. Martinu, "Characterization of homogeneous and inhomogeneous Si-based optical coatings deposited in dual-frequency plasma," Opt. Eng. 35, 2693-2699 (1996).
18. L. Martinu, J. E. Klemberg-Sapieha, O. M. Küttel, A. Raveh, and M. R. Wertheimer, "Critical ion energy and ion flux in the growth of films by plasma-enhanced chemical-vapor deposition," J. Vac. Sci. Technol. A 12, 1360-1364 (1994).
19. O. Zabeida, A. Hallil, M. R. Wertheimer, and L. Martinu, "Time-resolved measurements of ion energy distributions in dual-mode pulsed-microwave/radio frequency plasma," J. Appl. Phys. 88, 635-642 (2000).
20. J. E. Klemberg-Sapieha, O. M. Küttel, L. Martinu, and M. R. Wertheimer, "Dual microwave-r.f. plasma deposition of functional coatings," Thin Solid Films 193/194, 965-972 (1990).
21. M. R. Wertheimer, L. Martinu, and M. Moisan, "Microwave and dual-frequency plasma processing," in Plasma Processing of Polymers, R. d'Agostino, F. Fracassi, and P. Favia, eds. Vol. 346 of Applied Sciences Series (Kluwer Academic, Dordrecht, The Netherlands, 1997), pp. 101-127.
22. T.-R. Ji and J. Gerling, "A versatile microwave plasma applicator," J. Microwave Power Electromagn. Energy 23, 3-10 (1988).
23. D. E. Aspnes, "Optical properties of thin films," Thin Solid Films 89, 249-262 (1982).
24. W. C. Oliver and G. M. Pharr, "An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments," J. Mater. Res. 7, 1564-1583 (1992).
25. 1.3 coatings prepared by low temperature plasma enhanced chemical vapor deposition," Thin Solid Films 426, 150-159 (2003).
26. A. Amassian, S. Larouche, R. Vernhes, J. E. Klemberg-Sapieha, P. Desjardins, and L. Martinu, "Analysis and control of optical film growth by in situ real-time spectroscopic ellipsometry," in Proceedings of Opto-Canada, SPIE Regional Meeting on Optoelectronics, Photonics, and Imaging, SPIE TD01 pp. 493-495 (2002).
27. P. Jedrzejowski, J. Cizek, A. Amassian, J. E. Klemberg-Sapieha, J. Vlcek, and L. Martinu, "Mechanical and optical properties of hard SiCN coatings prepared by PECVD," Thin Solid Films (to be published).
28. M.-A. Raymond, S. Larouche, O. Zabeida, L. Martinu, and J. E. Klemberg-Sapieha, "Tribological properties of PECVD optical coatings," in Proceedings of the 44th Annual Technical Conference of the Society of Vacuum Coaters (Society of Vacuum Coaters, Albuquerque, N.Mex., 2001), pp. 301-305.