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Volumn 223, Issue 1-3, 2004, Pages 196-199

Characterization of LiNb 1-x Ta x O 3 composition-spread thin film by the scanning microwave microscope

(13) Okazaki, Noriaki a Okazaki, Sohei b Higuma, Hiroko c Miyashita, Shoji c Cho, Yasuo d Nishimura, Jun e Fukumura, Tomoteru e Kawasaki, Masashi e Murakami, Makoto b Yamamoto, Yukio b Matsumoto, Yuji b Koinuma, Hideomi a,b Hasegawa, Tetsuya a,b

a NATIONAL INSTITUTE FOR MATERIALS SCIENCE (Japan)

b TOKYO INSTITUTE OF TECHNOLOGY (Japan)

c MITSUBISHI ELECTRIC CORPORATION (Japan)

d TOHOKU UNIVERSITY (Japan)

e TOHOKU UNIVERSITY (Japan)

Author keywords

Composition spread thin film; Concurrent X ray diffraction; Dielectric constant; High throughput characterization; Lithium niobate; Lithium tantalate; Pulsed laser deposition (PLD); Scanning microwave microscope (S M)

Indexed keywords

COMPOSITION; CRYSTALLIZATION; LIGHT MODULATORS; LITHIUM COMPOUNDS; OPTICAL SWITCHES; OPTICAL WAVEGUIDES; PERMITTIVITY; PULSED LASER DEPOSITION; THROUGHPUT; X RAY DIFFRACTION;

OPTICAL DOPING; SCANNING MICROWAVE MICROSCOPE;

THIN FILMS;

EID: 0346304801 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/S0169-4332(03)00916-4 Document Type: Article

Times cited : (7)

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