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Volumn 30, Issue 1, 1999, Pages 33-39

Scanning tunneling microscopy studies during semiconductor growth

Author keywords

Germanium; Molecular beam epitaxy (MBE); Scanning tunneling microscopy (STM); Semiconductor; Silicon; Thin films

Indexed keywords


EID: 0345561642     PISSN: 09684328     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0968-4328(98)00043-2     Document Type: Article
Times cited : (3)

References (20)
  • 1
    • 0000344041 scopus 로고
    • An easily operable scanning tunneling microscope
    • Besocke K. An easily operable scanning tunneling microscope. Surf. Sci. 181:1987;145-153.
    • (1987) Surf. Sci. , vol.181 , pp. 145-153
    • Besocke, K.1
  • 3
    • 6144242562 scopus 로고    scopus 로고
    • Mean field theory of quantum dot formation
    • Dobbs H.T., et al. Mean field theory of quantum dot formation. Phys. Rev. Lett. 79:1997;897-900.
    • (1997) Phys. Rev. Lett. , vol.79 , pp. 897-900
    • Dobbs, H.T.1
  • 4
    • 3643130905 scopus 로고
    • Dislocation-free Stranski-Krastanov growth of Ge on Si(100)
    • Eaglesham D.J., Cerullo M. Dislocation-free Stranski-Krastanov growth of Ge on Si(100). Phys. Rev. Lett. 64:1990;1943-1947.
    • (1990) Phys. Rev. Lett. , vol.64 , pp. 1943-1947
    • Eaglesham, D.J.1    Cerullo, M.2
  • 5
    • 0000396589 scopus 로고    scopus 로고
    • Nucleation of hut pits and clusters during gassource molecular beam epitaxy of Ge/Si(001)
    • Goldfarb L., Hayden P.T., Owen J.H.G., Briggs G.A.D. Nucleation of hut pits and clusters during gassource molecular beam epitaxy of Ge/Si(001). Phys. Rev. Lett. 78:1997;3959-3962.
    • (1997) Phys. Rev. Lett. , vol.78 , pp. 3959-3962
    • Goldfarb, L.1    Hayden, P.T.2    Owen, J.H.G.3    Briggs, G.A.D.4
  • 6
    • 0024737555 scopus 로고
    • Nucleation and growth of epitaxial silicon on Si(001) and Si(l11) surfaces by scanning tunneling microscopy
    • Hamers R.L., Köhler U.K., Demuth L.E. Nucleation and growth of epitaxial silicon on Si(001) and Si(l11) surfaces by scanning tunneling microscopy. Ultramicroscopy. 31:1989;10-19.
    • (1989) Ultramicroscopy , vol.31 , pp. 10-19
    • Hamers, R.L.1    Köhler, U.K.2    Demuth, L.E.3
  • 7
    • 0000086551 scopus 로고
    • Dynamic observation of Si crystal growth on a Si(l11)7×7 surface by high-temperature scanning tunneling microscopy
    • Hasegawa T., Kohno M., Hosaka S., Hosoki S. Dynamic observation of Si crystal growth on a Si(l11)7×7 surface by high-temperature scanning tunneling microscopy. Phys Rev. B48:1993;1943-1946.
    • (1993) Phys Rev. , vol.48 , pp. 1943-1946
    • Hasegawa, T.1    Kohno, M.2    Hosaka, S.3    Hosoki, S.4
  • 8
    • 0026168998 scopus 로고
    • Strained layer growth and islanding of germanium on Si(l 11) (7x7) studied with STM
    • Köhler U., Jusko O., Pietsch G., Miller B., Henzler M. Strained layer growth and islanding of germanium on Si(l 11) (7x7) studied with STM. Surface Sci. 248:1991;321-331.
    • (1991) Surface Sci. , vol.248 , pp. 321-331
    • Köhler, U.1    Jusko, O.2    Pietsch, G.3    Miller, B.4    Henzler, M.5
  • 9
    • 0012092519 scopus 로고
    • Time-resolved observation of CVDgrowth of silicon on Si(l11) with STM
    • Köhler U., Andersohn L., Dahlheimer B. Time-resolved observation of CVDgrowth of silicon on Si(l11) with STM. Appl. Phys. A57:1993;491-497.
    • (1993) Appl. Phys. , vol.57 , pp. 491-497
    • Köhler, U.1    Andersohn, L.2    Dahlheimer, B.3
  • 10
    • 0026900662 scopus 로고
    • Scanning tunneling microscopy of surfactantmediated epitaxy of Ge on Si(l1l): Strain relief mechanisms and growth kinetics
    • Meyer G., Voigtländer B., Amer N.M. Scanning tunneling microscopy of surfactantmediated epitaxy of Ge on Si(l1l): strain relief mechanisms and growth kinetics. Surf. Sci. Lett. 274:1992;L541-L545.
    • (1992) Surf. Sci. Lett. , vol.274 , pp. 541-L545
    • Meyer, G.1    Voigtländer, B.2    Amer, N.M.3
  • 11
    • 0001861369 scopus 로고
    • Superfast transistors from silicon-germanium
    • Meyerson B.S. Superfast transistors from silicon-germanium. Sci. Am. 270:1994;42-47.
    • (1994) Sci. Am , vol.270 , pp. 42-47
    • Meyerson, B.S.1
  • 13
    • 0000518968 scopus 로고    scopus 로고
    • Direct tests of microscopic growth models using hot scanning tunneling microscopy movies
    • Pearson Ch., Krueger M., Gartz E. Direct tests of microscopic growth models using hot scanning tunneling microscopy movies. Phys. Rev. Lett. 76:1996;2306-2309.
    • (1996) Phys. Rev. Lett. , vol.76 , pp. 2306-2309
    • Pearson, Ch.1    Krueger, M.2    Gartz, E.3
  • 14
    • 0027642035 scopus 로고
    • Equilibrium theory of the Stranski-Krastanov epitaxial morphology
    • Ratsch C., Zangwill A. Equilibrium theory of the Stranski-Krastanov epitaxial morphology. Surf. Sci. 293:1993;123-131.
    • (1993) Surf. Sci. , vol.293 , pp. 123-131
    • Ratsch, C.1    Zangwill, A.2
  • 15
    • 0028438831 scopus 로고
    • Step structure dependent stepflow: Models for homoepitaxial growth at the atomic steps on Si(111)7×7
    • Shimada W., Toshihara H. Step structure dependent stepflow: models for homoepitaxial growth at the atomic steps on Si(111)7×7. Surf. Sci. 311:1994;107-125.
    • (1994) Surf. Sci. , vol.311 , pp. 107-125
    • Shimada, W.1    Toshihara, H.2
  • 16
    • 36449002434 scopus 로고
    • Simultaneous molecular beam epitaxy growth and scanning tunneling microscopy imaging during Ge/Si epitaxy
    • Voigtländer B., Zinner A. Simultaneous molecular beam epitaxy growth and scanning tunneling microscopy imaging during Ge/Si epitaxy. Appl. Phys. Lett. 63:1993;3055-3057.
    • (1993) Appl. Phys. Lett. , vol.63 , pp. 3055-3057
    • Voigtländer, B.1    Zinner, A.2
  • 17
    • 0000258696 scopus 로고    scopus 로고
    • High temperature scanning tunneling microscopy during molecular beam epitaxy
    • Voigtländer B., Zinner A., Weber Th. High temperature scanning tunneling microscopy during molecular beam epitaxy. Rev. Sci. Instr. 67:1996;2568-2572.
    • (1996) Rev. Sci. Instr. , vol.67 , pp. 2568-2572
    • Voigtländer, B.1    Zinner, A.2    Weber, Th.3
  • 18
    • 0038464254 scopus 로고    scopus 로고
    • Growth processes in Si/Si(l11) epitaxy observed by scanning tunneling microscopy during epitaxy
    • Voigtländer B., Weber th. Growth processes in Si/Si(l11) epitaxy observed by scanning tunneling microscopy during epitaxy. Phys. Rev. Lett. 7:1996;3861-3864.
    • (1996) Phys. Rev. Lett. , vol.7 , pp. 3861-3864
    • Voigtländer, B.1    Weber, Th.2
  • 19
    • 0030412291 scopus 로고    scopus 로고
    • In vivo STM studies of the growth of germanium and silicon on silicon
    • Voigtländer B., Kästner M. In vivo STM studies of the growth of germanium and silicon on silicon. Appl. Phys. A63:1996;577-581.
    • (1996) Appl. Phys. , vol.63 , pp. 577-581
    • Voigtländer, B.1    Kästner, M.2
  • 20
    • 0342515604 scopus 로고    scopus 로고
    • Dynamical STM studies of the growth of silicon and germanium on silicon
    • Voigtländer B., Bonzel H.P., Ibach H. Dynamical STM studies of the growth of silicon and germanium on silicon. Z. Phys. Chem. 198:1997;189-203.
    • (1997) Z. Phys. Chem. , vol.198 , pp. 189-203
    • Voigtländer, B.1    Bonzel, H.P.2    Ibach, H.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.