Ionisation and trapping of hydrogen at SiO2 interfaces

Materials Science and Engineering: B

Volumn 58, Issue 1-2, 1999, Pages 56-59

  Afanas'ev, V V ^a   Stesmans, A ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

Fixed charge; Hydrogen; Interfaces; Silicon; Surface ionization

Indexed keywords

ANNEALING; HYDROGEN; HYDROGEN BONDS; IONIZATION OF GASES; SILICA; SILICON; SURFACE PHENOMENA;

SURFACE IONIZATION;

INTERFACES (MATERIALS);

EID: 0345072493     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(98)00275-X     Document Type: Article

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