Microstructure and electrical properties of Pb(Zr, Ti)O3 thick film prepared by electrostatic spray deposition

Sensors and Actuators, A: Physical

Volumn 108, Issue 1-3, 2003, Pages 2-6

  Lu, Jian ^a   Chu, Jiaru ^a   Huang, Wenhao ^a   Ping, Zhiming ^a  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

Electrostatic spray deposition; Film; MEMS; Microelectromechanical system; PZT

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTALLINE MATERIALS; DEPOSITION; ELECTRIC PROPERTIES; ELECTROSTATICS; LEAD COMPOUNDS; MICROSTRUCTURE; PERMITTIVITY; SCANNING ELECTRON MICROSCOPY; SOL-GELS; SPRAYING; TEXTURES;

ELECTROSTATIC SPRAY DEPOSITION (ESD); SPRAY CLOUD;

THICK FILMS;

EID: 0344945494     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(03)00259-0     Document Type: Conference Paper

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