X-ray diffraction and scanning electron microscopy observation of lead zirconate titanate thick film formed by gas deposition method

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 9 SUPPL. B, 1997, Pages 5815-5819

  Ichiki, Masaaki ^a   Akedo, Jun ^a   Schroth, Andreas ^a,b   Maeda, Ryutaro ^a   Ishikawa, Yuichi ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b Micromachine Center   (Japan)

Author keywords

Actuator; Fabrication technology; Gas deposition method; Lead zirconate titanate; PZT; Thick film; Ultrafine particle

Indexed keywords

ACTUATORS; ATOMIC FORCE MICROSCOPY; CRYSTAL STRUCTURE; DEPOSITION; FILM PREPARATION; LEAD COMPOUNDS; PARTICLES (PARTICULATE MATTER); PERMITTIVITY; SCANNING ELECTRON MICROSCOPY; SINTERING; THICK FILMS; X RAY CRYSTALLOGRAPHY;

GAS DEPOSITION METHOD; JET MOLDING SYSTEM; LEAD ZIRCONATE TITANATE;

FERROELECTRIC MATERIALS;

EID: 0031221111     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.5815     Document Type: Article

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