Fabrication and characterization of torsion-mirror actuators for optical networking applications

Sensors and Actuators, A: Physical

Volumn 108, Issue 1-3, 2003, Pages 175-181

  Wu, W G ^a   Li, D C ^b   Sun, W ^a   Hao, Y L ^a   Yan, G Z ^a   Jin, S J ^a  

^a PEKING UNIVERSITY   (China)

^b TIANJIN UNIVERSITY   (China)

Author keywords

Fiber holding structures; Light scattering and reflection; MEMS; Mixed micromachining; Surface roughness; Torsion mirror actuators

Indexed keywords

ELECTRIC POTENTIAL; FIBER OPTIC NETWORKS; LIGHT SCATTERING; MICROMACHINING; MIRRORS; OPTICAL COMMUNICATION; SILICON WAFERS; SURFACE ROUGHNESS; TORSIONAL STRESS;

FIBER HOLDING STRUCTURES; TORSION-MIRROR ACTUATORS;

ACTUATORS;

EID: 0344945449     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(03)00366-2     Document Type: Conference Paper

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