Time-Resolved Electron Energy Distribution Function in Pulsed Surface Wave Plasma Generated by Ring-Slot Antenna

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 42, Issue 10 A, 2003, Pages

  Murohashi, Hiroyuki ^a   Okamoto, Tetsu ^b   Okamoto, Yukio ^a  

^a TOYO UNIVERSITY   (Japan)

^b USHIO INC   (Japan)

Author keywords

Electron energy distribution function; Ring slot antenna; Surface wave plasma; Time modulated plasma; Time resolved probe measurement

Indexed keywords

ARGON; MICROWAVES; PLASMA DENSITY; PULSE MODULATION; SUBSTRATES; SURFACE WAVES;

ELECTRON ENERGY DISTRIBUTION FUNCTION (EEDF); MICROWAVE POWER; RING-SLOT ANTENNAS;

ELECTRON ENERGY LEVELS;

EID: 0344514177     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.l1188     Document Type: Article

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