Effect of electron energy distribution function on spectroscopic characteristics of microwave discharge argon plasma

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 8, 2002, Pages 5432-5441

  Kashiwazaki, Ryouji ^a   Akatsuka, Hiroshi ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Argon plasma; Collisional radiative model; Druyvesteynian distribution; EEDF; Maxwellian distribution; Microwave discharge; Spectroscopic diagnostics

Indexed keywords

ARGON; ELECTRONIC DENSITY OF STATES; MICROWAVES; NORMAL DISTRIBUTION; PRESSURE EFFECTS; SPECTROSCOPIC ANALYSIS;

ELECTRON ENERGY DISTRIBUTION FUNCTION (EEDF);

PLASMA DIAGNOSTICS;

EID: 0036697533     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.41.5432     Document Type: Article

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