Fabrication of diffractive optical elements by ArF-laser ablation of fused silica

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4977, Issue , 2003, Pages 235-240

  Békési, József ^a   Schäfer, Dirk ^a   Ihlemann, Jürgen ^a   Simon, Peter ^a  

^a LASER LABORATORIUM GÖTTINGEN E V   (Germany)

Author keywords

Diffractive optical elements; Femtosecond laser; Fused silica; Laser ablation

Indexed keywords

ALGORITHMS; DIFFRACTIVE OPTICS; EXCIMER LASERS; FOURIER TRANSFORMS; FUSED SILICA; ITERATIVE METHODS; LASER ABLATION; MICROMACHINING;

DIFFRACTIVE OPTICAL ELEMENTS; FEMTOSECOND LASER; ITERATIVE FOURIER TRANSFORM ALGORITHM;

OPTICAL DEVICES;

EID: 0344430183     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.479226     Document Type: Conference Paper

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