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Journal of Crystal Growth

Volumn 221, Issue 1-4, 2000, Pages 129-135

Kinetic study of P and As desorption from binary and ternary III-V semiconductors surface by in situ ellipsometry

(3) Feron O a Nakano, Y a Shimogaki, Y a

a UNIVERSITY OF TOKYO (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; ARSENIC; DESORPTION; ELLIPSOMETRY; PHOSPHORUS; REACTION KINETICS; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTOR DEVICE MODELS;

ARRHENIUS THEORY;

HETEROJUNCTIONS;

EID: 0343774149 PISSN: 00220248 EISSN: None Source Type: Journal
DOI: 10.1016/S0022-0248(00)00672-2 Document Type: Article

Times cited : (13)

References (17)

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