Temperature studies of optical birefringence and X-ray diffraction with poly(p-xylylene), poly(chloro-p-xylylene) and poly(tetrafluoro-p-xylylene) CVD thin films

Polymer

Volumn 41, Issue 7, 1999, Pages 2379-2390

  Senkevich, J J ^a   Desu, S B ^a   Simkovic, V ^a  

^a VIRGINIA POLYTECHNIC INSTITUTE AND STATE UNIVERSITY   (United States)

Author keywords

Birefringence; Poly(chloro p xylylene); Poly(p xylylene)

Indexed keywords

ANNEALING; BIREFRINGENCE; CHEMICAL VAPOR DEPOSITION; CHLORINE CONTAINING POLYMERS; FLUORINE CONTAINING POLYMERS; MOLECULAR STRUCTURE; PERMITTIVITY; PLASTIC FILMS; ULSI CIRCUITS; X RAY DIFFRACTION ANALYSIS;

POLYCHLOROXYLYLENE; POLYTETRAFLUOROXYLYLENE; POLYXYLYLENE;

AROMATIC POLYMERS;

POLYMER;

ANISOTROPY; ARTICLE; BIREFRINGENCE; CHEMICAL STRUCTURE; CRYSTALLIZATION; DIELECTRIC CONSTANT; ENERGY; FILM; POLARIZATION; SYNTHESIS; TEMPERATURE; X RAY DIFFRACTION;

EID: 0343550314     PISSN: 00323861     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0032-3861(99)00419-X     Document Type: Article

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