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Volumn 233-235, Issue , 1999, Pages 387-394
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Designed abrasive diamond surfaces
a a a a |
Author keywords
Abrasive; Chemical vapor deposition; Diamond
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Indexed keywords
ABRASION;
CHEMICAL VAPOR DEPOSITION;
DIAMOND FILMS;
ETCHING;
FRACTURE TESTING;
GRINDING (MACHINING);
PHOTOLITHOGRAPHY;
RAMAN SPECTROSCOPY;
SCANNING ELECTRON MICROSCOPY;
SILICON WAFERS;
SURFACE STRUCTURE;
SURFACE TESTING;
ABRASIVE DIAMOND SURFACE;
PACKING DENSITY;
ABRASIVES;
ABRASIVE WEAR;
DIAMOND;
GRINDING;
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EID: 0343485001
PISSN: 00431648
EISSN: None
Source Type: Journal
DOI: 10.1016/S0043-1648(99)00219-7 Document Type: Conference Paper |
Times cited : (21)
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References (10)
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