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Volumn 224, Issue 1, 1999, Pages 118-125
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The particle size effect in abrasion studied by controlled abrasive surfaces
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Author keywords
Abrasion; Controlled abrasive surfaces; Particle size effect
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Indexed keywords
COMPUTER SIMULATION;
ETCHING;
PARTICLE SIZE ANALYSIS;
SILICON;
SURFACE PROPERTIES;
CONTROLLED ABRASIVE SURFACES;
PARTICLE SIZE EFFECT;
WEAR RATE;
ABRASION;
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EID: 0032759613
PISSN: 00431648
EISSN: None
Source Type: Journal
DOI: 10.1016/S0043-1648(98)00344-5 Document Type: Article |
Times cited : (99)
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References (22)
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