New sensor on-chip technology for micromechanical acceleration-threshold switches

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3891, Issue , 1999, Pages 112-120

  Wycisk, Michael ^a   Binder, Josef ^a   Michaelis, Sven ^a   Timme, Hans Joerg ^a  

^a UNIVERSITY OF BREMEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTRIC SWITCHES; ELECTROPLATING; PHOTOLITHOGRAPHY; SENSORS; ULTRAVIOLET RADIATION;

ACCELERATION-THRESHOLD SWITCHES;

MICROELECTROMECHANICAL DEVICES;

EID: 0033315348     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)